Works about MICROELECTROMECHANICAL systems

Results: 4442

Overcoming stiction in MEMS.

Published in:

Solid State Technology, 2001, v. 44, n. 10, p. 24

By:

Dejule, Ruth

Publication type:

Article

Optimizing plasma etch for MEMS devices.

Published in:

Solid State Technology, 2001, v. 44, n. 6, p. 135

By:

Werbaneth, Paul

Publication type:

Article

The killer application that may eat its siblings.

Published in:

Solid State Technology, 2001, v. 44, n. 3, p. 54

By:

Gulliksen, J. Eric

Publication type:

Article

World's first diamond micromachines created at Sandia.

Published in:

Solid State Technology, 2000, v. 43, n. 5, p. 42

By:

Burggraaf, Pieter

Publication type:

Article

Low noise microchannels developed.

Published in:: Solid State Technology, 2000, v. 43, n. 3, p. 22
Publication type:: Article

Silicon wafer bonding for MEMS manufacturing.

Published in:

Solid State Technology, 1999, v. 42, n. 8, p. 73

By:

Mirza, A.R.;
Ayon, A.A.

Publication type:

Article

Long-term outlook for MEMS: New applications and markets(*).

Published in:

Solid State Technology, 1999, v. 42, n. 7, p. 62

By:

Jeromski, Grace

Publication type:

Article

Micromachining sales to rise.

Published in:: Solid State Technology, 1998, v. 41, n. 12, p. 16
Publication type:: Article

MEMS program at Singapore's Institute of Microelectronics.

Published in:

Solid State Technology, 1998, v. 41, n. 11, p. 28

By:

Lim, Jason

Publication type:

Article

MICROFLUIDICS @ THE BEACH: Introduction of Microfluidics Technology to the ChE Curriculum at Cal State Long Beach.

Published in:

CEE: Chemical Engineering Education, 2015, v. 49, n. 2, p. 111

By:

LO, ROGER C.;
BHATIA, HINA;
VENKATRAMAN, RAHUL;
JANG, LARRY K.

Publication type:

Article

INSIDE THE CELL: A New Paradigm for Unit Operations and Unit Processes?

Published in:

CEE: Chemical Engineering Education, 2006, v. 40, n. 2, p. 126

By:

Schultz, Jerome S.

Publication type:

Article

A homogenisation-based continuum damage mechanics model for cyclic damage in 3D composites.

Published in:

Aeronautical Journal, 2009, v. 113, n. 1144, p. 371, doi. 10.1017/S0001924000003043

By:

Ghosh, S.;
Jam, J. R.

Publication type:

Article

A Micromechanical Model for the Elastic Properties of Semicrystalline Thermoplastic Polymers.

Published in:

Polymer Engineering & Science, 2004, v. 44, n. 3, p. 433, doi. 10.1002/pen.20039

By:

Guan, X.;
Pitchumani, R.

Publication type:

Article

Experimental Investigation and Numerical Simulation of Injection Molding With Micro-Features.

Published in:

Polymer Engineering & Science, 2002, v. 42, n. 5, p. 871

By:

Yu, L.;
Koh, C.G.;
Lee, L.J.;
Koeling, K.W.;
Madou, M.J.

Publication type:

Article

Production of a superhydrophobic frame-cone structure by laser etching and Ni electrodeposition.

Published in:

Surface Engineering, 2023, v. 39, n. 1, p. 25, doi. 10.1080/02670844.2023.2189648

By:

Liu, Hao;
Di, Yuelan;
Wang, Haidou;
Zhao, Yuncai

Publication type:

Article

Magnetic performance and corrosion resistance of cobalt based magnetic films.

Published in:

Surface Engineering, 2013, v. 29, n. 10, p. 761, doi. 10.1179/1743294413Y.0000000212

By:

Wu, P. P.;
Jiang, L.;
Sun, Y.;
Peng, Q. J.;
Yu, Y. D.;
Ge, H. L.

Publication type:

Article

Pulsed Biased Growth of Nanocrystalline Diamond by Hot Filament Chemical Vapour Deposition.

Published in:

Surface Engineering, 2004, v. 20, n. 3, p. 181, doi. 10.1179/026708404225010720

By:

Jones, A. N.;
Ahmed, W.;
Hassan, I. U.;
Sein, H.;
Rego, C. A.

Publication type:

Article

Avoiding MEMS failures.

Published in:

Electronics Systems & Software, 2005, v. 3, n. 5, p. 22

By:

Lavu, Srikanth;
Desmulliez, Marc;
Begbie, Mark;
Ball, George;
De Wolf, Ingrid

Publication type:

Article

Is this the world's smallest mass flow and pressure controller.

Published in:: Computing & Control Engineering, 2005, v. 16, n. 5, p. 4
Publication type:: Article

Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis.

Published in:

International Journal of Wavelets, Multiresolution & Information Processing, 2020, v. 18, n. 1, p. N.PAG, doi. 10.1142/S0219691319410133

By:

Preethi, A. Angelin Peace;
Karthigaikumar, P.

Publication type:

Article

Polymers as Sensing Layers in MEMS Biosensors for Molecular Diagnosis.

Published in:

Macromolecular Symposia, 2025, v. 414, n. 1, p. 1, doi. 10.1002/masy.202400113

By:

Niranjan, Arpana;
Gupta, Pallavi;
Rajoria, Manisha;
Noor, I. M.

Publication type:

Article

Polymer‐Based MEMS Sensor for Label‐Free Chikungunya Virus Detection.

Published in:

Macromolecular Symposia, 2023, v. 407, n. 1, p. 1, doi. 10.1002/masy.202200104

By:

Niranjan, Arpana;
Gupta, Pallavi;
Rajoria, Manisha

Publication type:

Article

Application of Micro Electrical Discharge Machining and Electrochemical Machining in Manufacturing of Micro‐Electromechanical Systems: A Review.

Published in:

Macromolecular Symposia, 2022, v. 404, n. 1, p. 1, doi. 10.1002/masy.202100449

By:

Enciu, Cornel‐Cristian;
Pârvu, Gabriela‐Marina;
Ghiculescu, Liviu‐Daniel;
Opran, Constantin Gheorghe

Publication type:

Article

Micromechanical Investigation of Debonding Processes in Composite Solid Propellants.

Published in:

Propellants, Explosives, Pyrotechnics, 2018, v. 43, n. 7, p. 642, doi. 10.1002/prep.201700199

By:

Li, Gaochun;
Wang, Yufeng;
Jiang, Aiming;
Yang, Ming;
Li, JinFei

Publication type:

Article

Investigation of the Failure Mechanism of HTPB/AP/Al Propellant by In-situ Uniaxial Tensile Experimentation in SEM.

Published in:

Propellants, Explosives, Pyrotechnics, 2016, v. 41, n. 4, p. 700, doi. 10.1002/prep.201500264

By:

van Ramshorst, Marthinus C. J.;
Di Benedetto, Giuseppe L.;
Duvalois, Willem;
Hooijmeijer, Peter A.;
van der Heijden, Antoine E. D. M.

Publication type:

Article

A Decade of Porous Silicon as Nano-Explosive Material.

Published in:

Propellants, Explosives, Pyrotechnics, 2014, v. 39, n. 3, p. 348, doi. 10.1002/prep.201300053

By:

Plessis, Monuko du

Publication type:

Article

The Stoichiometry of Electroless Silicon Etching in Solutions of V2O5 and HF.

Published in:

Angewandte Chemie, 2013, v. 125, n. 26, p. 6863, doi. 10.1002/ange.201300755

By:

Kolasinski, Kurt W.;
Barclay, William B.

Publication type:

Article

Electrically and Sunlight-Driven Actuator with Versatile Biomimetic Motions Based on Rolled Carbon Nanotube Bilayer Composite.

Published in:

Advanced Functional Materials, 2017, v. 27, n. 44, p. n/a, doi. 10.1002/adfm.201704388

By:

Hu, Ying;
Liu, Jiaqin;
Chang, Longfei;
Yang, Lulu;
Xu, Aifeng;
Qi, Ke;
Lu, Pin;
Wu, Guan;
Chen, Wei;
Wu, Yucheng

Publication type:

Article

Thermoelectric Polymer Aerogels for Pressure-Temperature Sensing Applications.

Published in:

Advanced Functional Materials, 2017, v. 27, n. 44, p. n/a, doi. 10.1002/adfm.201703549

By:

Han, Shaobo;
Jiao, Fei;
Khan, Zia Ullah;
Edberg, Jesper;
Fabiano, Simone;
Crispin, Xavier

Publication type:

Article

In-Plane Micro-Supercapacitors for an Integrated Device on One Piece of Paper.

Published in:

Advanced Functional Materials, 2017, v. 27, n. 43, p. n/a, doi. 10.1002/adfm.201702394

By:

Guo, Ruisheng;
Chen, Jiangtao;
Yang, Bingjun;
Liu, Lingyang;
Su, Lijun;
Shen, Baoshou;
Yan, Xingbin

Publication type:

Article

3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling.

Published in:

Advanced Functional Materials, 2017, v. 27, n. 14, p. n/a, doi. 10.1002/adfm.201605914

By:

Ning, Xin;
Wang, Heling;
Yu, Xinge;
Soares, Julio A. N. T.;
Yan, Zheng;
Nan, Kewang;
Velarde, Gabriel;
Xue, Yeguang;
Sun, Rujie;
Dong, Qiyi;
Luan, Haiwen;
Lee, Chan Mi;
Chempakasseril, Aditya;
Han, Mengdi;
Wang, Yiqi;
Li, Luming;
Huang, Yonggang;
Zhang, Yihui;
Rogers, John A.

Publication type:

Article

Reusable and Long-Lasting Active Microcleaners for Heterogeneous Water Remediation.

Published in:

Advanced Functional Materials, 2016, v. 26, n. 23, p. 4152, doi. 10.1002/adfm.201600381

By:

Parmar, Jemish;
Vilela, Diana;
Pellicer, Eva;
Esqué‐de los Ojos, Daniel;
Sort, Jordi;
Sánchez, Samuel

Publication type:

Article

Enzyme Micropump-Based Inhibitor Assays.

Published in:

Advanced Functional Materials, 2016, v. 26, n. 13, p. 2135, doi. 10.1002/adfm.201504619

By:

Ortiz‐Rivera, Isamar;
Courtney, Taylor M.;
Sen, Ayusman

Publication type:

Article

Interface Engineering and Controlling the Friction and Wear of Ultrathin Carbon Films: High sp3 Versus High sp2 Carbons.

Published in:

Advanced Functional Materials, 2016, v. 26, n. 10, p. 1526, doi. 10.1002/adfm.201503731

By:

Dwivedi, Neeraj;
Yeo, Reuben J.;
Zhang, Zheng;
Dhand, Chetna;
Tripathy, Sudhiranjan;
Bhatia, Charanjit S.

Publication type:

Article

Metallic Glass as a Mechanical Material for Microscanners.

Published in:

Advanced Functional Materials, 2015, v. 25, n. 35, p. 5677, doi. 10.1002/adfm.201502456

By:

Lin, Yu‐Ching;
Tsai, Yao‐Chuan;
Ono, Takahito;
Liu, Pan;
Esashi, Masayoshi;
Gessner, Thomas;
Chen, Mingwei

Publication type:

Article

Locally and Dynamically Controllable Surface Topography Through the Use of Particle-Enhanced Soft Composites.

Published in:

Advanced Functional Materials, 2015, v. 25, n. 24, p. 3641, doi. 10.1002/adfm.201501035

By:

Guttag, Mark;
Boyce, Mary C.

Publication type:

Article

Demonstrating kHz Frequency Actuation for Conducting Polymer Microactuators.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 30, p. 4851, doi. 10.1002/adfm.201400373

By:

Maziz, Ali;
Plesse, Cedric;
Soyer, Caroline;
Chevrot, Claude;
Teyssié, Dominique;
Cattan, Eric;
Vidal, Frederic

Publication type:

Article

Vapor Phase Metal-Assisted Chemical Etching of Silicon.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 24, p. 3827, doi. 10.1002/adfm.201304129

By:

Hildreth, Owen J.;
Schmidt, Daniel R.

Publication type:

Article

Wearable, Human-Interactive, Health-Monitoring, Wireless Devices Fabricated by Macroscale Printing Techniques.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 22, p. 3299, doi. 10.1002/adfm.201303874

By:

Honda, Wataru;
Harada, Shingo;
Arie, Takayuki;
Akita, Seiji;
Takei, Kuniharu

Publication type:

Article

Key issues and challenges in device level fabrication of MEMS acoustic sensors using piezo thin films doped with strontium and lanthanum.

Published in:

Journal of Materials Science: Materials in Electronics, 2022, v. 33, n. 14, p. 11271, doi. 10.1007/s10854-022-08102-2

By:

Kathiresan, M.;
Manikandan, C.;
Premkumar, S.;
Varadarajan, E.;
Ramesh, R.;
Jayaraj, M. K.;
Santhanakrishnan, T.

Publication type:

Article

Direct integration of carbon nanotubes on a suspended Pt microheater for hydrogen gas sensing.

Published in:

Journal of Materials Science: Materials in Electronics, 2021, v. 32, n. 14, p. 19626, doi. 10.1007/s10854-021-06484-3

By:

Lee, Kyungtaek;
Park, Jeonhyeong;
Jung, Soon In;
Hajra, Sugato;
Kim, Hoe Joon

Publication type:

Article

Influence of current density on the physical properties of electroplated NiFeP nano thin films for MEMS applications.

Published in:

Journal of Materials Science: Materials in Electronics, 2021, v. 32, n. 10, p. 13610, doi. 10.1007/s10854-021-05939-x

By:

Kalaivani, A.;
Mohanbabu, B.;
Kannan, R.;
Senguttuvan, G.;
Sivakumar, V.;
Guo, Donghui

Publication type:

Article

Overview of residual stress in MEMS structures: Its origin, measurement, and control.

Published in:

Journal of Materials Science: Materials in Electronics, 2021, v. 32, n. 6, p. 6705, doi. 10.1007/s10854-021-05405-8

By:

Dutta, Shankar;
Pandey, Akhilesh

Publication type:

Article

Effect of growth and residual stress in AlN (0002) thin films on MEMS accelerometer design.

Published in:

Journal of Materials Science: Materials in Electronics, 2020, v. 31, n. 20, p. 17281, doi. 10.1007/s10854-020-04282-x

By:

Gupta, Nidhi;
Dutta, Shankar;
Pandey, Akhilesh;
Vanjari, Siva Rama Krishna;
Kaur, Davinder

Publication type:

Article

NO2 gas sensing properties of Pd/WO3 films prepared by glancing angle deposition.

Published in:

Journal of Materials Science: Materials in Electronics, 2020, v. 31, n. 8, p. 5827, doi. 10.1007/s10854-019-02585-2

By:

Liu, Hao;
Xu, Yaohua;
Zhang, Xiao;
Zhao, Wenrui;
Ming, Anjie;
Wei, Feng

Publication type:

Article

Study of selective isotropic etching Si1−xGex in process of nanowire transistors.

Published in:

Journal of Materials Science: Materials in Electronics, 2020, v. 31, n. 1, p. 134, doi. 10.1007/s10854-019-02269-x

By:

Li, Junjie;
Wang, Wenwu;
Li, Yongliang;
Zhou, Na;
Wang, Guilei;
Kong, Zhenzhen;
Fu, Jianyu;
Yin, Xiaogen;
Li, Chen;
Wang, Xiaolei;
Yang, Hong;
Ma, Xueli;
Han, Jianghao;
Zhang, Jing;
Wei, Yijun;
Hu, Tairan;
Yang, Tao;
Li, Junfeng;
Yin, Huaxiang;
Zhu, Huilong

Publication type:

Article

SiNx films and membranes for photonic and MEMS applications.

Published in:

Journal of Materials Science: Materials in Electronics, 2020, v. 31, n. 1, p. 90, doi. 10.1007/s10854-019-01164-9

By:

Xiong, Wenjuan;
Jiang, Haojie;
Li, Tingting;
Zhang, Peng;
Xu, Qing;
Zhao, Xuewei;
Wang, Guilei;
Liu, Yaodong;
Luo, Ying;
Li, Zhihua;
Li, Junfeng;
Yu, Jinzhong;
Chao, Zhao;
Wang, Wenwu;
Radamson, Henry H.

Publication type:

Article

Dual-axis thermal convective inclinometer based on CNT/PDMS composite.

Published in:

Journal of Materials Science: Materials in Electronics, 2018, v. 29, n. 22, p. 18997, doi. 10.1007/s10854-018-0025-x

By:

Zhang, Shaoda;
Chen, Changsong;
Bin, Wu;
Zheng, Xingyu;
San, Haisheng;
Hofmann, Werner

Publication type:

Article

Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices.

Published in:

Journal of Materials Science: Materials in Electronics, 2018, v. 29, n. 13, p. 11367, doi. 10.1007/s10854-018-9224-8

By:

Potrepka, D. M.;
Rivas, M.;
Yu, H.;
Aindow, M.;
Fox, G. R.;
Polcawich, R. G.

Publication type:

Article

Investigation on the effects of low-temperature anodic bonding and its reliability for MEMS packaging using destructive and non-destructive techniques.

Published in:

Journal of Materials Science: Materials in Electronics, 2018, v. 29, n. 1, p. 217, doi. 10.1007/s10854-017-7908-0

By:

Joyce, Robin;
George, Minu;
Bhanuprakash, Lokasani;
Panwar, Deepak Kumar;
Bhatia, Ravi Raj;
Varghese, Soney;
Akhtar, Jamil

Publication type:

Article