Evolution in Lithography Techniques: Microlithography to Nanolithography.
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- Nanomaterials (2079-4991), 2022, v. 12, n. 16, p. 2754, doi. 10.3390/nano12162754
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Works matching Microlithography and Nanolithography
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Topology optimization for optical microlithography with partially coherent illumination.
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- International Journal for Numerical Methods in Engineering, 2017, v. 109, n. 5, p. 631, doi. 10.1002/nme.5299
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- Article