Works matching IS 2520811X AND DT 2021 AND VI 4 AND IP 3
Results: 9
Heterodyne Standing-Wave Interferometer with Improved Phase Stability.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 190, doi. 10.1007/s41871-021-00098-3
- By:
- Publication type:
- Article
Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 175, doi. 10.1007/s41871-021-00114-6
- By:
- Publication type:
- Article
Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 149, doi. 10.1007/s41871-021-00100-y
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- Publication type:
- Article
Foreword to the Special Issue on "Tip- and Laser-Based 3D Nanofabrication in Extended Macroscopic Working Areas".
- Published in:
- 2021
- By:
- Publication type:
- Editorial
Lau Effect Using LED Array for Lithography.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 165, doi. 10.1007/s41871-021-00108-4
- By:
- Publication type:
- Article
Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 181, doi. 10.1007/s41871-021-00103-9
- By:
- Publication type:
- Article
Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 156, doi. 10.1007/s41871-021-00102-w
- By:
- Publication type:
- Article
A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 200, doi. 10.1007/s41871-021-00101-x
- By:
- Publication type:
- Article
Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 3, p. 132, doi. 10.1007/s41871-021-00110-w
- By:
- Publication type:
- Article