Works matching IS 09514198 AND DT 2019 AND VI 33 AND IP 18


Results: 8
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    Small Al cluster ion implantation into Si and 4H‐SiC.

    Published in:
    Rapid Communications in Mass Spectrometry: RCM, 2019, v. 33, n. 18, p. 1449, doi. 10.1002/rcm.8489
    By:
    • Zeng, Xiaomei;
    • Pelenovich, Vasiliy;
    • Ieshkin, Alexei;
    • Danilov, Andrey;
    • Tolstogouzov, Alexander;
    • Zuo, Wenbin;
    • Ranjana, Jha;
    • Hu, Donghong;
    • Devi, Neena;
    • Fu, Dejun;
    • Xiao, Xiangheng
    Publication type:
    Article
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