Works matching IS 0947076X AND DT 2002 AND VI 14 AND IP 3


Results: 16
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    The Use of Ozone in Advanced Chip Manufacturing.

    Published in:
    Vakuum in Forschung und Praxis, 2002, v. 14, n. 3, p. 174, doi. 10.1002/1522-2454(200206)14:3<174::AID-VIPR174>3.0.CO;2-Z
    By:
    • Saito, Takayuki;
    • Sasaki, Kenichi;
    • Ozawa, Taku;
    • Yoda, Satoro
    Publication type:
    Article
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    Magnetoelektronik. Magnetoelectronics.

    Published in:
    Vakuum in Forschung und Praxis, 2002, v. 14, n. 3, p. 139, doi. 10.1002/1522-2454(200206)14:3<139::AID-VIPR139>3.0.CO;2-V
    By:
    • Schneider, C. M.;
    • Elefant, D.;
    • Tietjen, D.;
    • Vinzelberg, H.;
    • Kaltofen, R.;
    • Zotova, S.;
    • Thomas, J.;
    • Hecker, M.;
    • Mönch, I.
    Publication type:
    Article