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ナノダイヤモンドペレットを蒸着源に用いた アモルファスカーボン膜の作製
Published in:
Journal of the Japan Society for Abrasive Technology, 2024, v. 68, n. 5, p. 34
By:
田中一平;
文東洋輔;
大西亮多;
木本訓弘;
原田泰典
Publication type:
Article