Works matching IS 05431972 AND DT 2008 AND VI 51 AND IP 8

A test object with a line width less than 10 nm for scanning electron microscopy.

Published in:

Measurement Techniques, 2008, v. 51, n. 8, p. 839, doi. 10.1007/s11018-008-9135-9

By:

• M. Danilova;
• V. Mityukhlyaev;
• Yu. Novikov;
• Yu. Ozerin;
• A. Rakov;
• P. Todua

Publication type:

Article