Works matching IS 02562499 AND DT 2009 AND VI 34 AND IP 4
Results: 16
Sensors and packages based on LTCC and thick-film technology for severe conditions.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 677, doi. 10.1007/s12046-009-0031-z
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System integration design in MEMS - A case study of micromachined load cell.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 663, doi. 10.1007/s12046-009-0030-0
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Effect of metal coating and residual stress on the resonant frequency of MEMS resonators.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 651, doi. 10.1007/s12046-009-0029-6
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Composite Si/PS membrane pressure sensors with micro and macro-porous silicon.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 643, doi. 10.1007/s12046-009-0028-7
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Design and characterization of in-plane MEMS yaw rate sensor.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 633, doi. 10.1007/s12046-009-0027-8
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- Article
An X band RF MEMS switch based on silicon-on-glass architecture.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 625, doi. 10.1007/s12046-009-0026-9
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A novel MOEMS pressure sensor: Modelling and experimental evaluation.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 615, doi. 10.1007/s12046-009-0039-4
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Fabrication of polymer-based reflowed microlenses on optical fibre with control of focal length using differential coating technique.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 607, doi. 10.1007/s12046-009-0038-5
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- Article
Of light, of MEMS: Optical MEMS in telecommunications and beyond.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 599, doi. 10.1007/s12046-009-0037-6
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- Article
Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 591, doi. 10.1007/s12046-009-0036-7
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Biomicrofluidics: Recent trends and future challenges.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 573, doi. 10.1007/s12046-009-0035-8
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- Article
A new approach to integrate PLZT thin films with micro-cantilevers.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 563, doi. 10.1007/s12046-009-0034-9
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- Article
Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 557, doi. 10.1007/s12046-009-0033-x
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- Article
RF sputtering: A viable tool for MEMS fabrication.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 543, doi. 10.1007/s12046-009-0032-y
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- Article
Structure, properties, and MEMS and microelectronic applications of vanadium oxides.
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 531, doi. 10.1007/s12046-009-0025-x
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Microelectromechanical Systems (MEMS).
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- Sādhanā: Academy Proceedings in Engineering Sciences, 2009, v. 34, n. 4, p. 529
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- Article