Challenges in nanometrology: high precision measurement of position and size.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 346, doi. 10.1515/teme-2015-0002
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- Publication type:
- Article
Works matching IS 01718096 AND DT 2015 AND VI 82 AND IP 7/8
Results: 9
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2
High-resolution fiber-coupled interferometric point sensor for micro- and nano-metrology.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 367, doi. 10.1515/teme-2015-0006
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- Article
3
Einsatzblock mit einer Mehrfachfixpunktzelle für einen Temperatur-Blockkalibrator Insert with a multiple fixed-point cell for a dry block calibrator.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 402, doi. 10.1515/teme-2015-0008
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- Publication type:
- Article
4
Minimalinvasives, doppelt fasergekoppeltes Laserhygrometer für die schnelle in-situ Gasanalyse mit Absorptionslängen im Millimeterbereich Minimally invasive dual-fiber coupled laser hygrometer for fast in-situ gas analysis with absorption path length in the millimeter range
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 384, doi. 10.1515/teme-2015-0009
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- Article
5
Ongoing trends in precision metrology, particularly in nanopositioning and nanomeasuring technology.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 359, doi. 10.1515/teme-2015-0011
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- Publication type:
- Article
6
Ein kompakter Tastschnittsensor als Teil eines Multi-Sensor-Systems für Nanomessmaschinen A compact tactile surface profiler for multi-sensor systems in nano measuring machines.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 377, doi. 10.1515/teme-2015-0015
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- Article
7
Analyse, physikbasierte Modellierung und Systemidentifikation von Waagen nach dem Prinzip der elektromagnetischen Kraftkompensation (EMK) Analysis, physically motivated modeling and system identification of electromagnetic force compensated balances (EMFC)
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- Technisches Messen, 2015, v. 82, n. 7/8, p. 393, doi. 10.1515/teme-2015-0019
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- Article
8
58. Ilmenauer Wissenschaftliches Kolloquium - Nanomesstechnik und Prozessmesstechnik.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. 345, doi. 10.1515/teme-2015-0051
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- Article
9
Frontmatter.
- Published in:
- Technisches Messen, 2015, v. 82, n. 7/8, p. i, doi. 10.1515/teme-2015-frontmatter7-8
- Publication type:
- Article