At CMP-MIC, new models impose science on CMP.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 24
- By:
- Publication type:
- Article
Works matching IS 0038111X AND DT 1999 AND VI 42 AND IP 5
Results: 18
1
2
Report from DUMIC: Low-k still in development.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
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- Publication type:
- Article
3
Equipment life after shrinks.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 88
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- Publication type:
- Article
4
Exhaust gas monitoring: New window into semiconductor processing.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 61
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- Publication type:
- Article
5
In situ x-ray reflectivity for thin-film deposition monitoring and control.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 53
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- Publication type:
- Article
6
Single-layer resist design for 193nm lithography.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 29
- By:
- Publication type:
- Article
7
Low-k dielectric costs for dual-damascene integration.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 43
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- Publication type:
- Article
8
Patent Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
- Publication type:
- Article
9
Novellus drops parylene, bets on SiOC low-k.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 22
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- Publication type:
- Article
10
Quarterly Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
11
Financial Briefs.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 16
- Publication type:
- Article
12
Europe.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
13
Rest of World.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
14
Asia/Pacific.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 18
- Publication type:
- Article
15
Japan.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 16
- Publication type:
- Article
16
USA.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 14
- Publication type:
- Article
17
Worldwide highlights.
- Published in:
- Solid State Technology, 1999, v. 42, n. 5, p. 14
- Publication type:
- Article
18
Roadmapping over shifting terrain.
- Published in:
- 1999
- By:
- Publication type:
- Editorial