Works matching IS 00218995 AND DT 1982 AND VI 27 AND IP 3


Results: 31
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    Oxygen effect on characteristics of a PGMA resist.

    Published in:
    Journal of Applied Polymer Science, 1982, v. 27, n. 3, p. 1087, doi. 10.1002/app.1982.070270327
    By:
    • Taniguchi, Yoshio;
    • Kaneko, Tadao;
    • Nakano, Toshio;
    • Hashimoto, Michiaki;
    • Sasano, Akira;
    • Tsutsui, Ken;
    • Naraoka, Kiyotake
    Publication type:
    Article
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