Works matching IS 00011541 AND DT 1992 AND VI 38 AND IP 1


Results: 17
    1

    Adaptive control of photolithography.

    Published in:
    AIChE Journal, 1992, v. 38, n. 1, p. 1, doi. 10.1002/aic.690380102
    By:
    • Crisalle, Oscar D.;
    • Soper, Robert A.;
    • Mellichamp, Duncan A.;
    • Seborg, Dale E.
    Publication type:
    Article
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    Masthead.

    Published in:
    AIChE Journal, 1992, v. 38, n. 1, p. fmi, doi. 10.1002/aic.690380101
    Publication type:
    Article
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