Works matching DE "X-ray lithography"

Results: 41

X-ray stepper will have production role at Sanders GaAs facility.

Published in:

Solid State Technology, 2000, v. 43, n. 1, p. 22

By:

Dunn, Peter N.

Publication type:

Article

Fabrication and Performance Test of Fresnel Zone Plate with 35nm Outermost Zone Width in Hard X-Ray Region.

Published in:

X-Rays Optics & Instrumentation, 2010, p. 1, doi. 10.1155/2010/824387

By:

Suzuki, Yoshio;
Takeuchi, Akihisa;
Takenaka, Hisataka;
Okada, Ikuo

Publication type:

Article

Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF.

Published in:

Advances in Mechanical Engineering (Sage Publications Inc.), 2014, p. 1, doi. 10.1155/2014/981631

By:

Xuepeng Gong;
Qipeng Lu;
Zhongqi Peng

Publication type:

Article

Microinjection molding of plastic microfluidic chips including circular microchannels.

Published in:

Polymer Engineering & Science, 2014, v. 54, n. 1, p. 42, doi. 10.1002/pen.23535

By:

Lee, Bong‐Kee

Publication type:

Article

X-ray lithography and small-angle X-ray scattering: a combination of techniques merging biology and materials science.

Published in:

European Biophysics Journal, 2012, v. 41, n. 10, p. 851, doi. 10.1007/s00249-012-0843-3

By:

Marmiroli, B.;
Amenitsch, H.

Publication type:

Article

A convenient and rapid sample repositioning approach for atomic force microscopy.

Published in:

Journal of Microscopy, 2004, v. 216, n. 2, p. 194, doi. 10.1111/j.0022-2720.2004.01406.x

By:

Su, M.;
Pan, Z.;
Dravid, V. P.

Publication type:

Article

CPW fed grid dielectric resonator antennas with enhanced gain and bandwidth.

Published in:

International Journal of RF & Microwave Computer-Aided Engineering, 2019, v. 29, n. 3, p. N.PAG, doi. 10.1002/mmce.21639

By:

Mazhar, Waqas;
Klymyshyn, David M.;
Tayfeh Aligodarz, Matt;
Ganguly, Shaon;
Qureshi, Aqeel Ahmad;
Boerner, Martin

Publication type:

Article

Realization of Fabry-Perot resonators for hard X rays using micro- and nanotechnology.

Published in:

Crystallography Reports, 2007, v. 52, n. 1, p. 23, doi. 10.1134/S1063774507010038

By:

Chang, S.-L.

Publication type:

Article

Chemical and Molecular Variations in Commercial Epoxide Photoresists for X-ray Lithography.

Published in:

Applied Sciences (2076-3417), 2018, v. 8, n. 4, p. 528, doi. 10.3390/app8040528

By:

Vlnieska, Vitor;
Zakharova, Margarita;
Börner, Martin;
Bade, Klaus;
Mohr, Jürgen;
Kunka, Danays

Publication type:

Article

An inverse problem of estimating the Biot number in deep X-ray lithography.

Published in:

Applied Physics B: Lasers & Optics, 2008, v. 90, n. 1, p. 155, doi. 10.1007/s00340-007-2845-x

By:

Chang, W.-J.;
Chen, W.-L.;
Yang, Y.-C.;
Lee, H.-L.

Publication type:

Article

Optimization of transition radiation emitting targets for storage ring synchrotrons used as X-ray lithography sources.

Published in:

Applied Physics B: Lasers & Optics, 2007, v. 86, n. 1, p. 19, doi. 10.1007/s00340-006-2408-6

By:

Minkov, D.;
Yamada, H.;
Toyosugi, N.;
Yamaguchi, T.;
Kadono, T.;
Morita, M.

Publication type:

Article

Development of a 3-dimensional LIGA process and application to fabricate a spiral microcoil.

Published in:

Electrical Engineering in Japan, 2009, v. 166, n. 1, p. 43, doi. 10.1002/eej.20679

By:

Mekaru, Harutaka;
Kusumi, Shinji;
Sato, Noriaki;
Shimizu, Masami;
Yamashita, Michiru;
Shimada, Osamu;
Hattori, Tadashi

Publication type:

Article

Proposal of next-generation three-dimensional X-ray lithography and its application to fabrication of a high-luminescence optical waveguide for a liquid crystal backlight unit.

Published in:

Electrical Engineering in Japan, 2008, v. 165, n. 1, p. 52, doi. 10.1002/eej.20680

By:

Utsumi, Yuishi;
Kishimoto, Takefumi;
Hattori, Tadashi;
Minamitani, Megumi

Publication type:

Article

Nanolithography in microelectronics: A review.

Published in:

Technical Physics, 2011, v. 56, n. 8, p. 1061, doi. 10.1134/S1063784211080214

By:

Seisyan, R.

Publication type:

Article

Refractive X-ray lenses with rotation profile and curvature-radius scale reduction.

Published in:

Doklady Physics, 2009, v. 54, n. 6, p. 273, doi. 10.1134/S1028335809060056

By:

Aristov, V. V.;
Shabel'nikov, L. G.;
Shabel'nikova, Ya. L.;
Sagdullin, T. A.;
Panchenko, V. Ya.;
Evseev, A. V.;
Novikov, M. M.;
Asadchikov, V. E.;
Buzmakov, A. V.

Publication type:

Article

Design, fabrication, and test of soft x-ray sinusoidal transmission grating.

Published in:

Optical Engineering, 2008, v. 47, n. 5, p. 58001, doi. 10.1117/1.2919717

By:

Min Zhao;
XiaoLi Zhu;
Baoqin Chen;
ChangQing Xie;
Min Liu;
Jiebing Niu;
Longyu Kuang;
Leifeng Cao

Publication type:

Article

Micrograting fabricated by deep x-ray lithography for optical communications.

Published in:

Optical Engineering, 2007, v. 46, n. 4, p. 48001

By:

Cheng-Hao Ko;
Bor-Yuan Shew;
Shih-Che Hsu

Publication type:

Article

Zone plate focused soft X-ray lithography.

Published in:

Applied Physics A: Materials Science & Processing, 2011, v. 103, n. 1, p. 1, doi. 10.1007/s00339-010-6172-4

By:

Leontowich, Adam;
Hitchcock, Adam

Publication type:

Article

Enzyme-linked immunosorbent assay using vertical micro reactor stack for the detection of biomolecules.

Published in:

Electronics & Communications in Japan, 2010, v. 93, n. 4, p. 50, doi. 10.1002/ecj.10137

By:

Matsui, Katsuhiro;
Morimoto, Syohei;
Asano, Toshifumi;
Ukita, Yoshiaki;
Kato, Dai-Ichiro;
Takeo, Masahiro;
Utsumi, Yuichi;
Negoro, Seiji

Publication type:

Article

Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging.

Published in:

International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, 2018, v. 32, n. 13, p. -1, doi. 10.1142/S0217979218501631

By:

Wang, Bo;
Wang, Yu-Ting;
Yi, Fu-Ting;
Zhang, Tian-Chong;
Liu, Jing;
Zhou, Yue

Publication type:

Article

Microfocussing of synchrotron X-rays using X-ray refractive lens developed at Indus-2 deep X-ray lithography beamline.

Published in:

Pramana: Journal of Physics, 2014, v. 83, n. 1, p. 119, doi. 10.1007/s12043-014-0757-y

By:

DHAMGAYE, V;
TIWARI, M;
SAWHNEY, K;
LODHA, G

Publication type:

Article

Microwave cavity resonators using hard X-ray lithography.

Published in:

Microwave & Optical Technology Letters, 2005, v. 47, n. 4, p. 353, doi. 10.1002/mop.21168

By:

Ma, Z.;
Klymyshyn, D. M.;
Achenbach, S.;
Mohr, J.

Publication type:

Article

High-Q LIGA-MEMS vertical cantilever variable capacitors for upper microwave frequencies.

Published in:

Microwave & Optical Technology Letters, 2004, v. 42, n. 6, p. 507, doi. 10.1002/mop.20352

By:

Haluzan, Darcy T.;
Klymyshyn, David M.

Publication type:

Article

Electron beam lithography.

Published in:

Contemporary Physics, 1981, v. 22, n. 3, p. 265, doi. 10.1080/00107518108231531

By:

Pease, R.F.W.

Publication type:

Article

Abstracts of paper presented at the 2000 Pittsburgh Conference.

Published in:

Journal of Automated Methods & Management in Chemistry, 2001, v. 23, n. 2, p. 41, doi. 10.1080/146392400110036361

By:

Stockwell, Peter B.

Publication type:

Article

MAGNETIC PROPERTIES OF SPUTTERED COBALT FILMS ON X-RAY LITHOGRAPHIC SUBSTRATES.

Published in:

Digest Journal of Nanomaterials & Biostructures (DJNB), 2015, v. 10, n. 1, p. 1

By:

SUKONRAT, P.;
SIRISATHITKUL, C.;
RATTANASAKULTHONG, W.;
JANTARATANA, P.;
SRIPHUNG, C.

Publication type:

Article

Observations of fcc and hcp tantalum.

Published in:

Journal of Materials Science, 2015, v. 50, n. 10, p. 3706, doi. 10.1007/s10853-015-8931-2

By:

Janish, Matthew;
Kotula, Paul;
Boyce, Brad;
Carter, C.

Publication type:

Article

Fabrication of Step-Formed PDP Barrier Ribs with High Aspect Ratio by X-Ray Lithography.

Published in:

Molecular Crystals & Liquid Crystals, 2009, v. 514, p. 209, doi. 10.1080/15421400903240829

By:

Seung-Min Ryu;
Dong-Yol Yang;
Je-Yong So;
Lee-Soon Park;
Tae-Hoon Kim

Publication type:

Article

Effect of Nitrogen Implantation on the Performance of TOHOS Total Ionizing Dose Radiation Sensor Device.

Published in:

Sensors & Materials, 2016, v. 28, n. 5, p. 577

By:

Wen-Ching Hsieh;
Hao-Tien Daniel Lee;
Fuh-Cheng Jong;
Shich-Chuan Wu

Publication type:

Article

Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation.

Published in:

Materials (1996-1944), 2018, v. 11, n. 8, p. 1460, doi. 10.3390/ma11081460

By:

Park, Kyungjin;
Kim, Kanghyun;
Lee, Seung Chul;
Lim, Geunbae;
Kim, Jong Hyun

Publication type:

Article

Development of LIGA process using a superconducting compact synchrotron light source.

Published in:

Electrical Engineering in Japan, 1997, v. 120, n. 1, p. 40, doi. 10.1002/(SICI)1520-6416(19970715)120:1<40::AID-EEJ6>3.0.CO;2-P

By:

Takada, Hiroshi;
Hirata, Yoshihiro;
Okuyama, Hiroshi;
Numazawa, Toshiyuki

Publication type:

Article

TRANSIENT THREE-DIMENSIONAL NUMERICAL MODEL FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY.

Published in:

Numerical Heat Transfer: Part A -- Applications, 1998, v. 34, n. 8, p. 805, doi. 10.1080/10407789808914017

By:

Hegab, H.;
Shen, B.;
Dai, W.;
Ameel, T.

Publication type:

Article

PRECONDITIONED RICHARDSON NUMERICAL METHOD FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY.

Published in:

Numerical Heat Transfer: Part A -- Applications, 1998, v. 34, n. 6, p. 599, doi. 10.1080/10407789808914005

By:

Dai, W.;
Nassar, R.

Publication type:

Article

Immunoassay Using Microfluid Filters Constructed by Deep X-Ray Lithography.

Published in:

Bioscience, Biotechnology & Biochemistry, 2007, v. 71, n. 12, p. 3098, doi. 10.1271/bbb.70415

By:

Matsui, Katsuhiro;
Kawaji, Isao;
Utsumi, Yuichi;
Ukita, Yoshiaki;
Asano, Toshifumi;
Takeo, Masahiro;
Kato, Dai-ichiro;
Negoro, Seiji

Publication type:

Article

Move over, Superman, I've got X-ray vision too.

Published in:

Bulletin of the Atomic Scientists, 2001, v. 57, n. 4, p. 8

By:

Rothstein, Linda

Publication type:

Article

Direct-write X-ray lithography using a hard X-ray Fresnel zone plate.

Published in:

Journal of Synchrotron Radiation, 2015, v. 22, n. 3, p. 781, doi. 10.1107/S1600577515003306

By:

Lee, Su Yong;
Noh, Do Young;
Lee, Hae Cheol;
Yu, Chung-Jong;
Hwu, Yeukuang;
Kang, Hyon Chol

Publication type:

Article

The first microbeam synchrotron X-ray fluorescence beamline at the Siam Photon Laboratory.

Published in:

Journal of Synchrotron Radiation, 2012, v. 19, n. 4, p. 536, doi. 10.1107/S090904951201789X

By:

Tancharakorn, Somchai;
Tanthanuch, Waraporn;
Kamonsutthipaijit, Nuntaporn;
Wongprachanukul, Narupon;
Sophon, Methee;
Chaichuay, Sarunyu;
Uthaisar, Chunmanus;
Yimnirun, Rattikorn

Publication type:

Article

SHADOW3: a new version of the synchrotron X-ray optics modelling package.

Published in:

Journal of Synchrotron Radiation, 2011, v. 18, n. 5, p. 708, doi. 10.1107/S0909049511026306

By:

del Rio, Manuel Sanchez;
Canestrari, Niccolo;
Fan Jiang;
Cerrina, Franco

Publication type:

Article

Densification of sol-gel silica thin films induced by hard X-rays generated by synchrotron radiation.

Published in:

Journal of Synchrotron Radiation, 2011, v. 18, n. 2, p. 280, doi. 10.1107/S0909049510051666

By:

Innocenzi, Plinio;
Malfatti, Luca;
Kidchob, Tongjit;
Costacurta, Stefano;
Falcaro, Paolo;
Marmiroli, Benedetta;
Cacho-Nerin, Fernando;
Amenhtsch, Heinz

Publication type:

Article

Hard X-ray microbeam lithography using a Fresnel zone plate with a long focal length.

Published in:

Journal of Synchrotron Radiation, 2011, v. 18, n. 2, p. 143, doi. 10.1107/S0909049510044535

By:

Lee, S. Y.;
Cho, I. H.;
Kim, J. M.;
Kang, H. C.;
Noh, D. Y.

Publication type:

Article

Swelling behaviour of poly(methylmethacrylate) thick resist layers in deep X-ray lithography.

Published in:

Journal of Synchrotron Radiation, 2003, v. 10, n. 3, p. 272, doi. 10.1107/S0909049503005971

By:

Malek, C. Khan;
Das, S.

Publication type:

Article