Works matching DE "TRIODE sputtering"

Results: 2

Optical emission spectroscopy of the sputtering process in the triode system.

Published in:

Radiation Effects & Defects in Solids: Incorporating Plasma Techniques & Plasma Phenomena, 2014, v. 169, n. 9, p. 759, doi. 10.1080/10420150.2014.934822

By:

Axelevitch, Alexander;
Apter, Boris

Publication type:

Article

Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering.

Published in:

Ingeniería y Ciencia, 2014, v. 10, n. 20, p. 51

By:

Devia, D. M.;
Restrepo-Parra, E.;
Velez-Restrepo, J. M.

Publication type:

Article