Works matching DE "TRIODE sputtering"
Results: 2
Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering.
- Published in:
- Ingeniería y Ciencia, 2014, v. 10, n. 20, p. 51
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- Publication type:
- Article
Optical emission spectroscopy of the sputtering process in the triode system.
- Published in:
- Radiation Effects & Defects in Solids: Incorporating Plasma Techniques & Plasma Phenomena, 2014, v. 169, n. 9, p. 759, doi. 10.1080/10420150.2014.934822
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- Publication type:
- Article