Works matching DE "SPUTTER etching"
Results: 6
Experimental Study of SiO2 Sputter Etching Process in 13.56 MHz rf-Biased Inductively Coupled Plasma.
- Published in:
- SPIN (2010-3247), 2018, v. 8, n. 2, p. N.PAG, doi. 10.1142/S2010324718500029
- By:
- Publication type:
- Article
Software development for modeling irregular fine protrusions formed by sputter etching.
- Published in:
- Visual Computing for Industry, Biomedicine & Art, 2020, v. 3, n. 1, p. 1, doi. 10.1186/s42492-020-00047-9
- By:
- Publication type:
- Article
Non-destructive depth analysis of the surface oxide layer on Mg<sub>2</sub>Si with XPS and XAS.
- Published in:
- Surface & Interface Analysis: SIA, 2016, v. 48, n. 7, p. 432, doi. 10.1002/sia.5939
- By:
- Publication type:
- Article
Optimal conditions for gas cluster ion beams in studying inorganic interface species: improved chemical information at a ZnO interface.
- Published in:
- Surface & Interface Analysis: SIA, 2016, v. 48, n. 7, p. 575, doi. 10.1002/sia.5949
- By:
- Publication type:
- Article
Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna.
- Published in:
- Electronics Letters (Wiley-Blackwell), 2014, v. 50, n. 8, p. 615, doi. 10.1049/el.2014.0327
- By:
- Publication type:
- Article
High performance of graphene oxide-doped silicon oxide-based resistance random access memory.
- Published in:
- Nanoscale Research Letters, 2013, v. 8, n. 1, p. 1, doi. 10.1186/1556-276X-8-497
- By:
- Publication type:
- Article