Study of phase separation in Ti-Co-N thin films on silicon substrate.Published in:Applied Physics A: Materials Science & Processing, 1997, v. 64, n. 5, p. 517, doi. 10.1007/s003390050510By:Gromov, D.G.;Mochalov, A.I.;Pugachevich, V.P.;Kirilenko, E.P.;Trifonov, A.Y.Publication type:Article