A study on recovery of SiC from silicon wafer cutting slurry.
- Published in:
- Journal of Material Cycles & Waste Management, 2018, v. 20, n. 1, p. 375, doi. 10.1007/s10163-017-0591-7
- By:
- Publication type:
- Article
Works matching DE "SILICON wafer cleaning"
Results: 2
1
2
RECOVERY OF SILICON, COPPER AND ALUMINUM FROM SCRAP SILICON WAFERS BY LEACHING AND PRECIPITATION.
- Published in:
- Environmental Engineering & Management Journal (EEMJ), 2018, v. 17, n. 3, p. 561, doi. 10.30638/eemj.2018.057
- By:
- Publication type:
- Article