Study on the effect of process conditions on the thermo-optic coefficient of amorphous silicon films.
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- Modern Physics Letters B, 2016, v. 30, n. 14, p. -1, doi. 10.1142/S021798491650161X
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- Publication type:
- Article
Works matching DE "SILICON films testing"
Results: 2
1
2
Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures.
- Published in:
- Journal of Materials Science, 2015, v. 50, n. 4, p. 1553, doi. 10.1007/s10853-014-8715-0
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- Publication type:
- Article