Laser plasmochemical synthesis of hard protective SiCN films.
- Published in:
- Surface Engineering, 2015, v. 31, n. 8, p. 628, doi. 10.1179/1743294414Y.0000000443
- By:
- Publication type:
- Article
Works matching DE "SILICON carbonitride films"
Results: 24
1
2
Preparation and optical properties of SiCN thin films deposited by reactive magnetron sputtering.
- Published in:
- Journal of Materials Science: Materials in Electronics, 2017, v. 28, n. 9, p. 6769, doi. 10.1007/s10854-017-6373-0
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- Publication type:
- Article
3
Lithium intercalation into disordered carbon/SiCN composite. Part 2: Raman spectroscopy and Li MAS NMR investigation of lithium storage sites.
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- Journal of Solid State Electrochemistry, 2017, v. 21, n. 1, p. 47, doi. 10.1007/s10008-016-3337-x
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- Publication type:
- Article
4
Synthesis of thin silicon carbonitride films from hexamethyldisilazane in an inductively coupled plasma reactor.
- Published in:
- Inorganic Materials, 2015, v. 51, n. 9, p. 897, doi. 10.1134/S0020168515090162
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- Publication type:
- Article
5
Meso-Structuring of SiCN Ceramics by Polystyrene Templates.
- Published in:
- Nanomaterials (2079-4991), 2015, v. 5, n. 2, p. 425, doi. 10.3390/nano5020425
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- Publication type:
- Article
6
Influence of the Si-O-C interplayer on the flexural behaviors of C/Si-C-N composites.
- Published in:
- Composite Interfaces, 2019, v. 26, n. 1, p. 1, doi. 10.1080/09276440.2018.1465288
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- Publication type:
- Article
7
Magnetic Properties in Nonmagnetic Metal Atom Adsorption on SiC Monolayer: First-Principles Study.
- Published in:
- Journal of Superconductivity & Novel Magnetism, 2018, v. 31, n. 4, p. 1235, doi. 10.1007/s10948-017-4310-3
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- Publication type:
- Article
8
Analysis of silicon carbonitride films by laser mass spectrometry.
- Published in:
- Journal of Analytical Chemistry, 2013, v. 68, n. 14, p. 1212, doi. 10.1134/S1061934813140128
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- Publication type:
- Article
9
Amorphous silicon carbonitride thin‐film coatings produced by remote nitrogen microwave plasma chemical vapour deposition using organosilicon precursor.
- Published in:
- Applied Organometallic Chemistry, 2017, v. 31, n. 12, p. 1, doi. 10.1002/aoc.3871
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- Publication type:
- Article
10
MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF SILICON CARBONITRIDE DIELECTRIC BARRIER FILMS DEPOSITED BY SPUTTERING.
- Published in:
- Surface Review & Letters, 2018, v. 25, n. 3, p. 1, doi. 10.1142/S0218625X18500658
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- Publication type:
- Article
11
Phase composition of thin silicon carbonitride films obtained by plazma endanced chemical vapour deposition using organosilicon compounds.
- Published in:
- Journal of Structural Chemistry, 2015, v. 56, n. 1, p. 163, doi. 10.1134/S0022476615010229
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- Publication type:
- Article
12
A study of the chemical bond types in films deposited from bis(trimethylsilyl)-ethylamine by PECVD.
- Published in:
- Journal of Structural Chemistry, 2014, v. 55, n. 3, p. 456, doi. 10.1134/S0022476614030093
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- Publication type:
- Article
13
ANFIS-based Models for Coating Quality Prediction for Thin-Film Deposition Processes.
- Published in:
- Journal of Multiscale Modeling, 2021, v. 12, n. 3, p. 1, doi. 10.1142/S1756973721500074
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- Publication type:
- Article
14
Evaluation of Friction Coefficient and Adhesion Properties of Silicon Carbon Nitride Films Prepared by HWCVD.
- Published in:
- Acta Physica Polonica: A, 2017, v. 131, n. 3, p. 463, doi. 10.12693/APhysPolA.131.463
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- Publication type:
- Article
15
Features of low-temperature synthesis of silicon-carbon nanostructures on the γ-aluminum oxide surface.
- Published in:
- 2016
- By:
- Publication type:
- Letter
16
Physical-chemical properties of silicon carbonitride films prepared using laser-plasma deposition from hexamethyldisilazane.
- Published in:
- Glass Physics & Chemistry, 2015, v. 41, n. 2, p. 232, doi. 10.1134/S1087659615020042
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- Publication type:
- Article
17
Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties.
- Published in:
- Glass Physics & Chemistry, 2014, v. 40, n. 6, p. 643, doi. 10.1134/S1087659614060042
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- Publication type:
- Article
18
Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition.
- Published in:
- Glass Physics & Chemistry, 2014, v. 40, n. 5, p. 570, doi. 10.1134/S1087659614050034
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- Publication type:
- Article
19
Polymer-derived SiCN ceramics as fillers for polymer composites with high dielectric constants.
- Published in:
- Journal of Materials Science, 2019, v. 54, n. 9, p. 6982, doi. 10.1007/s10853-018-03299-2
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- Publication type:
- Article
20
Annealing of silicon carbonitride nanostructured thin films: interdependency of hydrogen content, optical, and structural properties.
- Published in:
- Journal of Materials Science, 2018, v. 53, n. 2, p. 1497, doi. 10.1007/s10853-017-1576-6
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- Publication type:
- Article
21
Void-shell silicon/carbon/SiCN nanostructures: toward stable silicon-based electrodes.
- Published in:
- Journal of Materials Science, 2016, v. 51, n. 12, p. 6051, doi. 10.1007/s10853-016-9911-x
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- Publication type:
- Article
22
Structural and chemical analysis of ternary SiC<sub>X</sub>N<sub>Y</sub> thin films deposited by improved hot filament chemical vapour deposition.
- Published in:
- Materials Research Innovations, 2014, v. 18, n. S4, p. 455, doi. 10.1179/1432891714Z.000000000836
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- Publication type:
- Article
23
Optical and magnetic resonance study of a-SiC<sub> x</sub>N<sub> y</sub> films obtained by magnetron sputtering.
- Published in:
- Physica Status Solidi (B), 2014, v. 251, n. 6, p. 1178, doi. 10.1002/pssb.201451041
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- Publication type:
- Article
24
Optical signal processing for indoor positioning using a-SiCH technology.
- Published in:
- Optical Engineering, 2016, v. 55, n. 10, p. 107105-1, doi. 10.1117/1.OE.55.10.107105
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- Publication type:
- Article