Works matching DE "REACTIVE-ion etching"

Results: 20

Anti‐icing polyimide thin film with microcolumns fabricated by RIE with cooling and PCVD.

Published in:

Micro & Nano Letters (Wiley-Blackwell), 2022, v. 17, n. 1, p. 1, doi. 10.1049/mna2.12097

By:

Shi, Xiaoxin;
Lv, Xianglian;
Lu, Jiangbo;
Xu, Yukun;
Yuan, Weizheng;
He, Yang

Publication type:

Article

Quantum well intermixing of multiple quantum wells on InP by argon plasma bombardment and the sputtered-SiO film.

Published in:

Applied Physics A: Materials Science & Processing, 2014, v. 115, n. 3, p. 931, doi. 10.1007/s00339-013-7899-5

By:

Chiu, C.;
Lay, T.

Publication type:

Article

Chromatographic separation of simulants of nerve and blister agents by combining one- and two-channel columns with different stationary phases.

Published in:

Journal of Separation Science, 2016, v. 39, n. 7, p. 1295, doi. 10.1002/jssc.201501138

By:

Yuan, Huan;
Du, Xiaosong;
Li, Yi;
Zhao, Xulan;
Xu, Ming

Publication type:

Article

Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna.

Published in:

Electronics Letters (Wiley-Blackwell), 2014, v. 50, n. 8, p. 615, doi. 10.1049/el.2014.0327

By:

Hongda Lu;
Xin Lv;
Kai Zhou;
Yong Liu

Publication type:

Article

Formation of broadband antireflective and superhydrophilic subwavelength structures on fused silica using one-step self-masking reactive ion etching.

Published in:

Scientific Reports, 2015, p. 13023, doi. 10.1038/srep13023

By:

Ye, Xin;
Jiang, Xiaodong;
Huang, Jin;
Geng, Feng;
Sun, Laixi;
Zu, Xiaotao;
Wu, Weidong;
Zheng, Wanguo

Publication type:

Article

Surface Defect Passivation of Silicon Micropillars.

Published in:

Advanced Materials Interfaces, 2018, v. 5, n. 20, p. N.PAG, doi. 10.1002/admi.201800865

By:

Mikulik, Dmitry;
Meng, Andrew C.;
Berrazouane, Riad;
Stückelberger, Josua;
Romero‐Gomez, Pablo;
Tang, Kechao;
Haug, Franz‐Josef;
Fontcuberta i Morral, Anna;
McIntyre, Paul C.

Publication type:

Article

Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications.

Published in:

Advances in Mechanical Engineering (Sage Publications Inc.), 2012, v. 4, p. 1, doi. 10.1155/2012/785798

By:

Li Zhang;
Jingyan Dong

Publication type:

Article

Traceable Nanomechanical Metrology of GaN Micropillar Array.

Published in:

Advanced Engineering Materials, 2018, v. 20, n. 10, p. N.PAG, doi. 10.1002/adem.201800353

By:

Fatahilah, Muhammad Fahlesa;
Yu, Feng;
Strempel, Klaas;
Peiner, Erwin;
Waag, Andreas;
Wasisto, Hutomo Suryo;
Langfahl‐Klabes, Jannick;
Felgner, André;
Li, Zhi;
Xu, Min;
Pohlenz, Frank;
Brand, Uwe;
Puranto, Prabowo

Publication type:

Article

Electroosmotic Flow in Microchannel with Black Silicon Nanostructures.

Published in:

Micromachines, 2018, v. 9, n. 5, p. 229, doi. 10.3390/mi9050229

By:

Lim, An Eng;
Lim, Chun Yee;
Lam, Yee Cheong;
Taboryski, Rafael

Publication type:

Article

Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections.

Published in:

Micromachines, 2018, v. 9, n. 5, p. 198, doi. 10.3390/mi9050198

By:

Ou, Fenlan;
Hou, Zhanqiang;
Wu, Xuezhong;
Xiao, Dingbang

Publication type:

Article

Reactive ion etching for fabrication of biofunctional titanium nanostructures.

Published in:

Scientific Reports, 2019, v. 9, n. 1, p. 1, doi. 10.1038/s41598-019-55093-y

By:

Ganjian, Mahya;
Modaresifar, Khashayar;
Zhang, Hongzhi;
Hagedoorn, Peter-Leon;
Fratila-Apachitei, Lidy E.;
Zadpoor, Amir A.

Publication type:

Article

Extraction of Light Using Random Nanocone on Poly(vinyl-butyral) for Flexible OLEDs.

Published in:

Scientific Reports, 2019, v. 9, n. 1, p. N.PAG, doi. 10.1038/s41598-019-48808-8

By:

Lee, Dong Jun;
Yoon, In Seon;
Park, Cheol Hwee;
Choi, Junhee;
Park, Young Wook;
Ju, Byeong-Kwon

Publication type:

Article

Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithography.

Published in:

Nanoscale Research Letters, 2013, v. 8, n. 1, p. 1, doi. 10.1186/1556-276X-8-472

By:

Cui, Lin;
Han, Jie-Cai;
Wang, Gui-Gen;
Zhang, Hua-Yu;
Sun, Rui;
Li, Ling-Hua

Publication type:

Article

Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions.

Published in:

International Journal of Photoenergy, 2016, p. 1, doi. 10.1155/2016/1815205

By:

Semenenko, Mykola O.;
Dusheiko, Mykhailo G.;
Mamykin, Sergiy V.;
Ganus, Valeriy O.;
Kirichenko, Mykhailo V.;
Zaitsev, Roman V.;
Kharchenko, Mykola M.;
Klyui, N. I.

Publication type:

Article

An ultra-black silicon absorber.

Published in:

Laser & Photonics Reviews, 2014, v. 8, n. 2, p. L13, doi. 10.1002/lpor.201300142

By:

Steglich, Martin;
Lehr, Dennis;
Ratzsch, Stephan;
Käsebier, Thomas;
Schrempel, Frank;
Kley, Ernst‐Bernhard;
Tünnermann, Andreas

Publication type:

Article

Reverse-Conducting IGBT Using MEMS Technology on the Wafer Back Side.

Published in:

ETRI Journal, 2013, v. 35, n. 4, p. 603, doi. 10.4218/etrij.13.1912.0030

By:

Jongil Won;
Jin Gun Koo;
Taepok Rhee;
Hyung-Seog Oh;
Jin Ho Lee

Publication type:

Article

Fabrication of microparabolic reflector for infrared antenna coupled detectors.

Published in:

Micro & Nano Letters (Wiley-Blackwell), 2018, v. 13, n. 9, p. 1343, doi. 10.1049/mnl.2017.0826

By:

Mubarak, Mohamed H.;
Sidek, Othman;
Abdel-Rahman, Mohamed R.;
Mustaffa, Mohamed Tafir;
Kamal, Ahmed Shukri Mustapa;
Mukras, Saad M.

Publication type:

Article

GaN LEDs fabricated using SF<sup>6</sup> plasma RIE.

Published in:

Micro & Nano Letters (Wiley-Blackwell), 2018, v. 13, n. 9, p. 1255, doi. 10.1049/mnl.2018.5083

By:

Khan, Wasif;
Xiaopeng Bi;
Fan, Bin;
Wen Li

Publication type:

Article

Single-mask fabrication of micro-probe electrode array with various tip heights and sharpness using isotropic and anisotropic etching.

Published in:

Micro & Nano Letters (Wiley-Blackwell), 2018, v. 13, n. 9, p. 1245, doi. 10.1049/mnl.2018.5064

By:

Young-min Shin;
Yong-Kweon Kim;
Seung-Ki Lee;
Jae-Hyoung Park

Publication type:

Article

Surface texturing method for silicon solar cell using reactive ion etching with metal mesh.

Published in:

Physica Status Solidi. A: Applications & Materials Science, 2014, v. 211, n. 8, p. 1844, doi. 10.1002/pssa.201330545

By:

Cho, Chanseob;
Kong, Daeyoung;
Oh, Jung‐Hwa;
Kim, Bonghwan;
Lee, Byeungleul;
Lee, Jonghyun

Publication type:

Article