Works about PLASMA-enhanced chemical vapor deposition
Results: 817
Environmental Impact of Physical Vapour Deposition and Plasma-Enhanced Chemical Vapour Deposition Technologies for Deposition of Diamond-like Carbon Coatings for Green Tribology.
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- Coatings (2079-6412), 2025, v. 15, n. 2, p. 218, doi. 10.3390/coatings15020218
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- Article
Stability and Reusability of Tungsten Catalyst on Structured Support in Catalytic Ozonation of Textile Wastewater.
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- Molecules, 2025, v. 30, n. 4, p. 969, doi. 10.3390/molecules30040969
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- Article
Editorial for the Special Issue on Thin Film Microelectronic Devices and Circuits.
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- 2025
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- Editorial
Low-energy plasma-enhanced CVD facilities high mobility SiGe.
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- Solid State Technology, 2000, v. 43, n. 12, p. 30
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- Article
Control of Hydrogenation Patterning for CVD Diamond Substrates by AFM Local Anodic Oxidation.
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- Surface Engineering, 2003, v. 19, n. 6, p. 441, doi. 10.1179/026708403225010091
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- Article
Tailored Si[sub 3]N[sub 4] Ceramic Substrates for CVD Diamond Coating.
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- Surface Engineering, 2003, v. 19, n. 6, p. 410, doi. 10.1179/026708403225010136
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- Article
Growth characteristics and electrical properties of SiO thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor.
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- Journal of Materials Science, 2016, v. 51, n. 11, p. 5082, doi. 10.1007/s10853-016-9811-0
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- Article
The dependence of Raman defect bands in silica glasses on densification revisited.
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- Journal of Materials Science, 2016, v. 51, n. 3, p. 1659, doi. 10.1007/s10853-015-9489-8
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- Article
Effect of plasma treatment on the microstructure and electrical properties of MIM capacitors with PECVD silicon oxide and silicon nitride.
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- Journal of Materials Science, 2007, v. 42, n. 3, p. 941, doi. 10.1007/s10853-006-0012-0
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- Article
Evolution and defect analysis of vertical graphene nanosheets.
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- Journal of Raman Spectroscopy, 2014, v. 45, n. 8, p. 642, doi. 10.1002/jrs.4530
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- Article
Effect of sp<sup>2</sup>-Hybridized Carbon Inclusions in Diamond Films on the Sensor Performance Toward Synchrotron Radiation.
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- Journal of Structural Chemistry, 2024, v. 65, n. 9, p. 1774, doi. 10.1134/S0022476624090087
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- Article
Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
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- Journal of Structural Chemistry, 2024, v. 65, n. 8, p. 1488, doi. 10.1134/S002247662408002X
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- Article
SYNTHESIS FEATURES AND STRUCTURAL CHARACTERIZATION OF CARBON NANOWALLS PREPARED FROM ORGANOBORON COMPOUNDS.
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- Journal of Structural Chemistry, 2022, v. 63, n. 7, p. 1180, doi. 10.1134/S0022476622070125
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- Article
SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM.
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- Journal of Structural Chemistry, 2020, v. 61, n. 12, p. 1865, doi. 10.1134/S0022476620120045
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- Article
X-ray photoelectron study of the effect of the composition of the initial gas phase on changes in the electronic structure of hexagonal boron nitride films obtained by PECVD from borazine.
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- Journal of Structural Chemistry, 2016, v. 57, n. 4, p. 670, doi. 10.1134/S0022476616040065
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- Article
A study of the chemical bond types in films deposited from bis(trimethylsilyl)-ethylamine by PECVD.
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- Journal of Structural Chemistry, 2014, v. 55, n. 3, p. 456, doi. 10.1134/S0022476614030093
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- Article
Composition and structure of silicon carbonitride layers grown on Si(100)/(Fe, N, Co) substrates.
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- Journal of Structural Chemistry, 2012, v. 53, n. 4, p. 812, doi. 10.1134/S0022476612040282
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- Article
X-ray photoelectron and auger spectroscopic study of the chemical composition of BCN films.
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- Journal of Structural Chemistry, 2012, v. 53, n. 4, p. 699, doi. 10.1134/S0022476612040129
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- Article
Performance comparison of flip-chip blue-light microLEDs with various passivation.
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- Discover Nano, 2024, v. 19, n. 1, p. 1, doi. 10.1186/s11671-024-04078-6
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- Article
The electronic properties of boron-doped germanium nanocrystals films.
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- Discover Nano, 2023, v. 18, n. 1, p. 1, doi. 10.1186/s11671-023-03893-7
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- Article
Bayesian optimization of hydrogen plasma treatment in silicon quantum dot multilayer and application to solar cells.
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- Discover Nano, 2023, v. 18, n. 1, p. 1, doi. 10.1186/s11671-023-03821-9
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- Article
Extremely low surface recombination velocities on low-resistivity n-type and p-type crystalline silicon using dynamically deposited remote plasma silicon nitride films.
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- Progress in Photovoltaics, 2014, v. 22, n. 6, p. 641, doi. 10.1002/pip.2320
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- Article
Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells - a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD.
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- Progress in Photovoltaics, 2014, v. 22, n. 2, p. 198, doi. 10.1002/pip.2254
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- Article
High-efficiency thin-film silicon solar cells with improved light-soaking stability.
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- Progress in Photovoltaics, 2013, v. 21, n. 6, p. 1363, doi. 10.1002/pip.2300
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- Article
20.1%‐efficient crystalline silicon solar cell with amorphous silicon rear‐surface passivation.
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- Progress in Photovoltaics, 2005, v. 13, n. 5, p. 381, doi. 10.1002/pip.641
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- Article
High-quality surface passivation of silicon solar cells in an industrial-type inline plasma silicon nitride deposition system.
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- Progress in Photovoltaics, 2004, v. 12, n. 1, p. 21, doi. 10.1002/pip.523
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- Article
Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating.
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- Science & Technology of Advanced Materials, 2017, v. 18, n. 1, p. 294, doi. 10.1080/14686996.2017.1312520
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- Article
Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition.
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- Science & Technology of Advanced Materials, 2015, v. 16, n. 3, p. 1, doi. 10.1088/1468-6996/16/3/035007
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- Article
Plasma‐Assisted Deposition of TiO<sub>2</sub> 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning (Adv. Mater. Interfaces 21/2021).
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- Advanced Materials Interfaces, 2021, v. 8, n. 21, p. 1, doi. 10.1002/admi.202100767
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- Article
Plasma‐Assisted Deposition of TiO<sub>2</sub> 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning.
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- Advanced Materials Interfaces, 2021, v. 8, n. 21, p. 1, doi. 10.1002/admi.202100767
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- Article
Transparent Flexible Ultra‐Low Permeability Encapsulation Film: Fusible Glass Fired on Heat‐Resistant Polyimide Membrane.
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- Advanced Materials Interfaces, 2020, v. 7, n. 23, p. 1, doi. 10.1002/admi.202001170
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- Article
Passivating Contacts: In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts (Adv. Mater. Interfaces 21/2020).
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- Advanced Materials Interfaces, 2020, v. 7, n. 21, p. 1, doi. 10.1002/admi.202070120
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- Article
Solvent‐Free Synthesis of Selectively Wetting Multilayer and Janus Membranes.
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- Advanced Materials Interfaces, 2020, v. 7, n. 20, p. 1, doi. 10.1002/admi.202001103
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- Article
Vertically Standing Graphene: Heater‐Free and Substrate‐Independent Growth of Vertically Standing Graphene Using A High‐Flux Plasma‐Enhanced Chemical Vapor Deposition (Adv. Mater. Interfaces 18/2020).
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- Advanced Materials Interfaces, 2020, v. 7, n. 18, p. 1, doi. 10.1002/admi.202070100
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- Article
Heater‐Free and Substrate‐Independent Growth of Vertically Standing Graphene Using A High‐Flux Plasma‐Enhanced Chemical Vapor Deposition.
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- Advanced Materials Interfaces, 2020, v. 7, n. 18, p. 1, doi. 10.1002/admi.202000854
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- Article
Plasma‐Assisted Growth of β‐MnO<sub>2</sub> Nanosystems as Gas Sensors for Safety and Food Industry Applications.
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- Advanced Materials Interfaces, 2018, v. 5, n. 23, p. N.PAG, doi. 10.1002/admi.201800792
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- Article
Super‐Elasticity and Ultralow Friction of Hydrogenated Fullerene‐Like Carbon Films: Associated with the Size of Graphene Sheets.
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- Advanced Materials Interfaces, 2018, v. 5, n. 6, p. 1, doi. 10.1002/admi.201701303
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- Article
Broad Spectral Response of Se-Doped SnS Nanorods Synthesized through Electrodeposition.
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- ChemElectroChem, 2017, v. 4, n. 6, p. 1478, doi. 10.1002/celc.201600826
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- Article
Innovative Approach to Graphene Film Synthesis: Factorial Design in PECVD Experiments.
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- Journal of Engineering & Technological Sciences, 2025, v. 57, n. 1, p. 78, doi. 10.5614/j.eng.technol.sci.2025.57.1.6
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- Article
Optimizing gas pressure for enhanced tribological properties of DLC-coated graphite.
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- Scientific Reports, 2024, v. 14, n. 1, p. 1, doi. 10.1038/s41598-024-74038-8
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- Article
Enhancing CO 2 Conversion to CO over Plasma-Deposited Composites Based on Mixed Co and Fe Oxides.
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- Catalysts (2073-4344), 2021, v. 11, n. 8, p. 883, doi. 10.3390/catal11080883
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- Article
Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting.
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- Catalysts (2073-4344), 2020, v. 10, n. 3, p. 278, doi. 10.3390/catal10030278
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- Article
Performance of p-i-n Hydrogenated Amorphous Silicon Thin Film Solar Cells Device.
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- Journal of Nano- & Electronic Physics, 2018, v. 10, n. 2, p. 1, doi. 10.21272/jnep.10(2).02045
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- Article
Optical Dispersion In Annealed Thin Films of S-doped a-Si:H Alloys.
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- Journal of Nano- & Electronic Physics, 2013, v. 5, n. 1, p. 01020-1
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- Article
Orders-of-magnitude enhancement in conductivity tuning in InGaZnO thin-film transistors via SiN<sub>x</sub> passivation and dual-gate modulation.
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- Journal of Information Display, 2019, v. 20, n. 3, p. 161, doi. 10.1080/15980316.2019.1649729
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- Article
Ammonia-Acetylene PECVD Coating on Wound Dressing to Control Delivery of Silver Sulfadiazine.
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- Walailak Journal of Science & Technology, 2018, v. 15, n. 7, p. 503
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- Article
DLC-Based Coatings Obtained by Low-Frequency Plasma-Enhanced Chemical Vapor Deposition (LFPECVD) in Cyclohexane, Principle and Examples.
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- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1225, doi. 10.3390/coatings11101225
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- Article
Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
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- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1218, doi. 10.3390/coatings11101218
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- Article
Sensitivity Enhancement in Plasma Polymer Films for Surface Acoustic Wave Based Sensor Applications.
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- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1193, doi. 10.3390/coatings11101193
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- Article
Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique.
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- Coatings (2079-6412), 2021, v. 11, n. 9, p. 1108, doi. 10.3390/coatings11091108
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- Article