Works matching DE "PLASMA-enhanced chemical vapor deposition"
Results: 818
Environmental Impact of Physical Vapour Deposition and Plasma-Enhanced Chemical Vapour Deposition Technologies for Deposition of Diamond-like Carbon Coatings for Green Tribology.
- Published in:
- Coatings (2079-6412), 2025, v. 15, n. 2, p. 218, doi. 10.3390/coatings15020218
- By:
- Publication type:
- Article
Stability and Reusability of Tungsten Catalyst on Structured Support in Catalytic Ozonation of Textile Wastewater.
- Published in:
- Molecules, 2025, v. 30, n. 4, p. 969, doi. 10.3390/molecules30040969
- By:
- Publication type:
- Article
Editorial for the Special Issue on Thin Film Microelectronic Devices and Circuits.
- Published in:
- 2025
- By:
- Publication type:
- Editorial
Low-energy plasma-enhanced CVD facilities high mobility SiGe.
- Published in:
- Solid State Technology, 2000, v. 43, n. 12, p. 30
- By:
- Publication type:
- Article
Control of Hydrogenation Patterning for CVD Diamond Substrates by AFM Local Anodic Oxidation.
- Published in:
- Surface Engineering, 2003, v. 19, n. 6, p. 441, doi. 10.1179/026708403225010091
- By:
- Publication type:
- Article
Tailored Si[sub 3]N[sub 4] Ceramic Substrates for CVD Diamond Coating.
- Published in:
- Surface Engineering, 2003, v. 19, n. 6, p. 410, doi. 10.1179/026708403225010136
- By:
- Publication type:
- Article
Growth characteristics and electrical properties of SiO thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor.
- Published in:
- Journal of Materials Science, 2016, v. 51, n. 11, p. 5082, doi. 10.1007/s10853-016-9811-0
- By:
- Publication type:
- Article
The dependence of Raman defect bands in silica glasses on densification revisited.
- Published in:
- Journal of Materials Science, 2016, v. 51, n. 3, p. 1659, doi. 10.1007/s10853-015-9489-8
- By:
- Publication type:
- Article
Effect of plasma treatment on the microstructure and electrical properties of MIM capacitors with PECVD silicon oxide and silicon nitride.
- Published in:
- Journal of Materials Science, 2007, v. 42, n. 3, p. 941, doi. 10.1007/s10853-006-0012-0
- By:
- Publication type:
- Article
Evolution and defect analysis of vertical graphene nanosheets.
- Published in:
- Journal of Raman Spectroscopy, 2014, v. 45, n. 8, p. 642, doi. 10.1002/jrs.4530
- By:
- Publication type:
- Article
Effect of sp<sup>2</sup>-Hybridized Carbon Inclusions in Diamond Films on the Sensor Performance Toward Synchrotron Radiation.
- Published in:
- Journal of Structural Chemistry, 2024, v. 65, n. 9, p. 1774, doi. 10.1134/S0022476624090087
- By:
- Publication type:
- Article
Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
- Published in:
- Journal of Structural Chemistry, 2024, v. 65, n. 8, p. 1488, doi. 10.1134/S002247662408002X
- By:
- Publication type:
- Article
SYNTHESIS FEATURES AND STRUCTURAL CHARACTERIZATION OF CARBON NANOWALLS PREPARED FROM ORGANOBORON COMPOUNDS.
- Published in:
- Journal of Structural Chemistry, 2022, v. 63, n. 7, p. 1180, doi. 10.1134/S0022476622070125
- By:
- Publication type:
- Article
SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM.
- Published in:
- Journal of Structural Chemistry, 2020, v. 61, n. 12, p. 1865, doi. 10.1134/S0022476620120045
- By:
- Publication type:
- Article
X-ray photoelectron study of the effect of the composition of the initial gas phase on changes in the electronic structure of hexagonal boron nitride films obtained by PECVD from borazine.
- Published in:
- Journal of Structural Chemistry, 2016, v. 57, n. 4, p. 670, doi. 10.1134/S0022476616040065
- By:
- Publication type:
- Article
A study of the chemical bond types in films deposited from bis(trimethylsilyl)-ethylamine by PECVD.
- Published in:
- Journal of Structural Chemistry, 2014, v. 55, n. 3, p. 456, doi. 10.1134/S0022476614030093
- By:
- Publication type:
- Article
Composition and structure of silicon carbonitride layers grown on Si(100)/(Fe, N, Co) substrates.
- Published in:
- Journal of Structural Chemistry, 2012, v. 53, n. 4, p. 812, doi. 10.1134/S0022476612040282
- By:
- Publication type:
- Article
X-ray photoelectron and auger spectroscopic study of the chemical composition of BCN films.
- Published in:
- Journal of Structural Chemistry, 2012, v. 53, n. 4, p. 699, doi. 10.1134/S0022476612040129
- By:
- Publication type:
- Article
Performance comparison of flip-chip blue-light microLEDs with various passivation.
- Published in:
- Discover Nano, 2024, v. 19, n. 1, p. 1, doi. 10.1186/s11671-024-04078-6
- By:
- Publication type:
- Article
The electronic properties of boron-doped germanium nanocrystals films.
- Published in:
- Discover Nano, 2023, v. 18, n. 1, p. 1, doi. 10.1186/s11671-023-03893-7
- By:
- Publication type:
- Article
Bayesian optimization of hydrogen plasma treatment in silicon quantum dot multilayer and application to solar cells.
- Published in:
- Discover Nano, 2023, v. 18, n. 1, p. 1, doi. 10.1186/s11671-023-03821-9
- By:
- Publication type:
- Article
Extremely low surface recombination velocities on low-resistivity n-type and p-type crystalline silicon using dynamically deposited remote plasma silicon nitride films.
- Published in:
- Progress in Photovoltaics, 2014, v. 22, n. 6, p. 641, doi. 10.1002/pip.2320
- By:
- Publication type:
- Article
Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells - a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD.
- Published in:
- Progress in Photovoltaics, 2014, v. 22, n. 2, p. 198, doi. 10.1002/pip.2254
- By:
- Publication type:
- Article
High-efficiency thin-film silicon solar cells with improved light-soaking stability.
- Published in:
- Progress in Photovoltaics, 2013, v. 21, n. 6, p. 1363, doi. 10.1002/pip.2300
- By:
- Publication type:
- Article
20.1%‐efficient crystalline silicon solar cell with amorphous silicon rear‐surface passivation.
- Published in:
- Progress in Photovoltaics, 2005, v. 13, n. 5, p. 381, doi. 10.1002/pip.641
- By:
- Publication type:
- Article
High-quality surface passivation of silicon solar cells in an industrial-type inline plasma silicon nitride deposition system.
- Published in:
- Progress in Photovoltaics, 2004, v. 12, n. 1, p. 21, doi. 10.1002/pip.523
- By:
- Publication type:
- Article
Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating.
- Published in:
- Science & Technology of Advanced Materials, 2017, v. 18, n. 1, p. 294, doi. 10.1080/14686996.2017.1312520
- By:
- Publication type:
- Article
Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition.
- Published in:
- Science & Technology of Advanced Materials, 2015, v. 16, n. 3, p. 1, doi. 10.1088/1468-6996/16/3/035007
- By:
- Publication type:
- Article
Plasma‐Assisted Deposition of TiO<sub>2</sub> 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning (Adv. Mater. Interfaces 21/2021).
- Published in:
- Advanced Materials Interfaces, 2021, v. 8, n. 21, p. 1, doi. 10.1002/admi.202100767
- By:
- Publication type:
- Article
Plasma‐Assisted Deposition of TiO<sub>2</sub> 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning.
- Published in:
- Advanced Materials Interfaces, 2021, v. 8, n. 21, p. 1, doi. 10.1002/admi.202100767
- By:
- Publication type:
- Article
Transparent Flexible Ultra‐Low Permeability Encapsulation Film: Fusible Glass Fired on Heat‐Resistant Polyimide Membrane.
- Published in:
- Advanced Materials Interfaces, 2020, v. 7, n. 23, p. 1, doi. 10.1002/admi.202001170
- By:
- Publication type:
- Article
Passivating Contacts: In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts (Adv. Mater. Interfaces 21/2020).
- Published in:
- Advanced Materials Interfaces, 2020, v. 7, n. 21, p. 1, doi. 10.1002/admi.202070120
- By:
- Publication type:
- Article
Solvent‐Free Synthesis of Selectively Wetting Multilayer and Janus Membranes.
- Published in:
- Advanced Materials Interfaces, 2020, v. 7, n. 20, p. 1, doi. 10.1002/admi.202001103
- By:
- Publication type:
- Article
Vertically Standing Graphene: Heater‐Free and Substrate‐Independent Growth of Vertically Standing Graphene Using A High‐Flux Plasma‐Enhanced Chemical Vapor Deposition (Adv. Mater. Interfaces 18/2020).
- Published in:
- Advanced Materials Interfaces, 2020, v. 7, n. 18, p. 1, doi. 10.1002/admi.202070100
- By:
- Publication type:
- Article
Heater‐Free and Substrate‐Independent Growth of Vertically Standing Graphene Using A High‐Flux Plasma‐Enhanced Chemical Vapor Deposition.
- Published in:
- Advanced Materials Interfaces, 2020, v. 7, n. 18, p. 1, doi. 10.1002/admi.202000854
- By:
- Publication type:
- Article
Plasma‐Assisted Growth of β‐MnO<sub>2</sub> Nanosystems as Gas Sensors for Safety and Food Industry Applications.
- Published in:
- Advanced Materials Interfaces, 2018, v. 5, n. 23, p. N.PAG, doi. 10.1002/admi.201800792
- By:
- Publication type:
- Article
Super‐Elasticity and Ultralow Friction of Hydrogenated Fullerene‐Like Carbon Films: Associated with the Size of Graphene Sheets.
- Published in:
- Advanced Materials Interfaces, 2018, v. 5, n. 6, p. 1, doi. 10.1002/admi.201701303
- By:
- Publication type:
- Article
Broad Spectral Response of Se-Doped SnS Nanorods Synthesized through Electrodeposition.
- Published in:
- ChemElectroChem, 2017, v. 4, n. 6, p. 1478, doi. 10.1002/celc.201600826
- By:
- Publication type:
- Article
Innovative Approach to Graphene Film Synthesis: Factorial Design in PECVD Experiments.
- Published in:
- Journal of Engineering & Technological Sciences, 2025, v. 57, n. 1, p. 78, doi. 10.5614/j.eng.technol.sci.2025.57.1.6
- By:
- Publication type:
- Article
Optimizing gas pressure for enhanced tribological properties of DLC-coated graphite.
- Published in:
- Scientific Reports, 2024, v. 14, n. 1, p. 1, doi. 10.1038/s41598-024-74038-8
- By:
- Publication type:
- Article
Enhancing CO 2 Conversion to CO over Plasma-Deposited Composites Based on Mixed Co and Fe Oxides.
- Published in:
- Catalysts (2073-4344), 2021, v. 11, n. 8, p. 883, doi. 10.3390/catal11080883
- By:
- Publication type:
- Article
Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting.
- Published in:
- Catalysts (2073-4344), 2020, v. 10, n. 3, p. 278, doi. 10.3390/catal10030278
- By:
- Publication type:
- Article
Performance of p-i-n Hydrogenated Amorphous Silicon Thin Film Solar Cells Device.
- Published in:
- Journal of Nano- & Electronic Physics, 2018, v. 10, n. 2, p. 1, doi. 10.21272/jnep.10(2).02045
- By:
- Publication type:
- Article
Optical Dispersion In Annealed Thin Films of S-doped a-Si:H Alloys.
- Published in:
- Journal of Nano- & Electronic Physics, 2013, v. 5, n. 1, p. 01020-1
- By:
- Publication type:
- Article
Orders-of-magnitude enhancement in conductivity tuning in InGaZnO thin-film transistors via SiN<sub>x</sub> passivation and dual-gate modulation.
- Published in:
- Journal of Information Display, 2019, v. 20, n. 3, p. 161, doi. 10.1080/15980316.2019.1649729
- By:
- Publication type:
- Article
Ammonia-Acetylene PECVD Coating on Wound Dressing to Control Delivery of Silver Sulfadiazine.
- Published in:
- Walailak Journal of Science & Technology, 2018, v. 15, n. 7, p. 503
- By:
- Publication type:
- Article
DLC-Based Coatings Obtained by Low-Frequency Plasma-Enhanced Chemical Vapor Deposition (LFPECVD) in Cyclohexane, Principle and Examples.
- Published in:
- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1225, doi. 10.3390/coatings11101225
- By:
- Publication type:
- Article
Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor.
- Published in:
- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1218, doi. 10.3390/coatings11101218
- By:
- Publication type:
- Article
Sensitivity Enhancement in Plasma Polymer Films for Surface Acoustic Wave Based Sensor Applications.
- Published in:
- Coatings (2079-6412), 2021, v. 11, n. 10, p. 1193, doi. 10.3390/coatings11101193
- By:
- Publication type:
- Article
Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique.
- Published in:
- Coatings (2079-6412), 2021, v. 11, n. 9, p. 1108, doi. 10.3390/coatings11091108
- By:
- Publication type:
- Article