Works about PHOTORESISTS

Results: 548

Developments in materials for 157nm photoresists.

Published in:: Solid State Technology, 2001, v. 44, n. 10, p. 63
Publication type:: Article

The impact of airborne molecular bases on DUV photoresists.

Published in:

Solid State Technology, 2001, v. 44, n. 8, p. 63

By:

Ruede, David;
Ereken, Monique;
Borgers, Tom

Publication type:

Article

Characterizing resists and films with VUV spectroscopic ellipsometry.

Published in:

Solid State Technology, 2001, v. 44, n. 7, p. 165

By:

Boher, Pierre;
Evrard, Patrick;
Piel, Jean Philippe;
Defranoux, Christophe;
Stehle, Jean Louis

Publication type:

Article

Low-temperature annealing system for 300mm thermal processing.

Published in:

Solid State Technology, 2001, v. 44, n. 6, p. 152

By:

Yoo, Woo Sik;
Yamazaki, Taro;
Uchino, Toshiyuki

Publication type:

Article

Analyzing and characterizing 193nm resist shrinkage.

Published in:

Solid State Technology, 2001, v. 44, n. 5, p. 52

By:

Su, Bo;
Eytan, Guy;
Padmanaban, Munirathna;
Romano, Andrew

Publication type:

Article

Direct temperature metrology helps minimize CA-resist CD variation.

Published in:

Solid State Technology, 2000, v. 43, n. 9, p. 139

By:

Parker, Jeffrey M.;
Dean, Kim R.;
Miller, Daniel A.

Publication type:

Article

Substrates with topography.

Published in:

Solid State Technology, 2000, v. 43, n. 8, p. 127

By:

Neisser, M.;
Grozev, G.;
Maenhoudt, M.;
Lepage, M.;
Struyf, H.

Publication type:

Article

PEB process in a CA resist.

Published in:

Solid State Technology, 2000, v. 43, n. 8, p. 95

By:

Hinsberg, William;
Hoffnagle, John;
Houle, Frances

Publication type:

Article

The effect of sub-0.1Mu m filtration on 248nm photoresist performance.

Published in:

Solid State Technology, 2000, v. 43, n. 7, p. 202

By:

Gotlinsky, Barry;
Mesawich, Michael;
Beach, James

Publication type:

Article

Successful ellipsometry at 157nm.

Published in:

Solid State Technology, 2000, v. 43, n. 5, p. 36

By:

Burggraaf, Pieter

Publication type:

Article

The challenges in materials design for 157nm photoresists.

Published in:

Solid State Technology, 2000, v. 43, n. 3, p. 41

By:

Patterson, Kyle;
Somervell, Mark;
Willson, C. Grant

Publication type:

Article

A novel resist and post-etch residue removal process using ozonated chemistry.

Published in:

Solid State Technology, 1998, v. 41, n. 12, p. 57

By:

Gendt, S. De;
Wauters, J.;
Heyns, M.

Publication type:

Article

Supercritical CO2 blasts photoresist.

Published in:

Solid State Technology, 1998, v. 41, n. 9, p. 32

By:

Burggraaf, Pieter

Publication type:

Article

Silicon-rich-methacrylate bilayer resist for 193-nm...

Published in:

Solid State Technology, 1998, v. 41, n. 6, p. 69

By:

Blakeney, Andrew;
Gabor, Allen;
White, Daniela;
Steinhausler, Thomas;
Deady, William;
Jarmalowicz, John;
Kunz, Roderick;
Dean, Kim;
Rich, Georgia;
Stark, David

Publication type:

Article

New 193-nm resist, resolution to 60 nm without phase shift.

Published in:

Solid State Technology, 1998, v. 41, n. 6, p. 44

By:

Lunday, Christine

Publication type:

Article

Characterization of Fractionated Phenolic Resins Used in Photoresists.

Published in:

Polymer Engineering & Science, 2003, v. 43, n. 10, p. 1675, doi. 10.1002/pen.10141

By:

Wanat, Stanley F.;
Dalil Rahman, M.

Publication type:

Article

Novel Strategies for Novolak Resin Fractionation: Consequences for Advanced Photoresist Applications.

Published in:

Polymer Engineering & Science, 2000, v. 40, n. 10, p. 2251, doi. 10.1002/pen.11357

By:

Narasimhan, Balaji;
Wanat, Stanley F.

Publication type:

Article

Two-Component Photoresists Containing Thermally Crosslinkable Photoacid Generators.

Published in:

Polymer Engineering & Science, 2000, v. 40, n. 5, p. 1248, doi. 10.1002/pen.11252

By:

Seong-Yun Moon;
Chan-Moon Chung

Publication type:

Article

Synthesis of N‐Substituted Maleimides and Poly(styrene‐co‐N‐maleimide) Copolymers and Their Potential Application as Photoresists.

Published in:

Macromolecular Chemistry & Physics, 2023, v. 224, n. 1, p. 1, doi. 10.1002/macp.202200256

By:

Eken, Gozde Aktas;
Käfer, Florian;
Yuan, Chenyun;
Andrade, Ivan;
Ober, Christopher K.

Publication type:

Article

9,10‐Dithio/oxo‐Anthracene as a Novel Photosensitizer for Photoinitiator Systems in Photoresists.

Published in:

Macromolecular Chemistry & Physics, 2019, v. 220, n. 15, p. N.PAG, doi. 10.1002/macp.201900152

By:

Lei, Jing;
Akitoshi, Tanimoto;
Katou, Sadaki;
Murakami, Yasuharu;
Yin, Jie;
Jiang, Xuesong

Publication type:

Article

Facile Preparation of Light Refractive Poly(aroxycarbonyltriazole)s by Metal-Free Click Polymerization.

Published in:

Macromolecular Chemistry & Physics, 2014, v. 215, n. 10, p. 1036, doi. 10.1002/macp.201400108

By:

Li, Hongkun;
Wang, Zhe;
Li, Jie;
Zhao, Engui;
Sun, Jing Zhi;
Lam, Jacky W. Y.;
Qin, Anjun;
Tang, Ben Zhong

Publication type:

Article

Metal Conductive Surface Patterning on Photoactive Polyimide.

Published in:

Advanced Functional Materials, 2017, v. 27, n. 33, p. n/a, doi. 10.1002/adfm.201701674

By:

Liu, Jing;
Li, Minfeng;
Yang, Yuzhao;
Xu, Lirong;
Lin, Jingjing;
Hong, Wei;
Chen, Xudong

Publication type:

Article

Rational and Facile Construction of 3D Annular Nanostructures with Tunable Layers by Exploiting the Diffraction and Interference of Light.

Published in:

Advanced Functional Materials, 2016, v. 26, n. 29, p. 5203, doi. 10.1002/adfm.201505614

By:

Choe, Jong‐Ho;
Park, Q‐Han;
You, Eun‐Ah

Publication type:

Article

Designing Multicolored Photonic Micropatterns through the Regioselective Thermal Compression of Inverse Opals.

Published in:

Advanced Functional Materials, 2016, v. 26, n. 25, p. 4587, doi. 10.1002/adfm.201601095

By:

Lee, Joon‐Seok;
Je, Kwanghwi;
Kim, Shin‐Hyun

Publication type:

Article

Contents: (Adv. Funct. Mater. 24/2015).

Published in:: Advanced Functional Materials, 2015, v. 25, n. 24, p. 3619, doi. 10.1002/adfm.201570160
Publication type:: Article

Two-Photon Nanolithography Enhances the Performance of an Ionic Liquid-Polymer Composite Sensor.

Published in:

Advanced Functional Materials, 2015, v. 25, n. 11, p. 1683, doi. 10.1002/adfm.201404370

By:

Bakhtina, Natalia A.;
Loeffelmann, Ute;
MacKinnon, Neil;
Korvink, Jan G.

Publication type:

Article

Profile Control in Block Copolymer Nanostructures using Bilayer Thin Films for Enhanced Pattern Transfer Processes.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 45, p. 7078, doi. 10.1002/adfm.201470295

By:

He, Chunlin;
Stoykovich, Mark P.

Publication type:

Article

Controlled Planar Alignment of Discotic Liquid Crystals in Microchannels Made Using SU8 Photoresist.

Published in:

Advanced Functional Materials, 2014, v. 23, n. 48, p. 5997, doi. 10.1002/adfm.201301613

By:

Cattle, James;
Bao, Peng;
Bramble, Jonathan P.;
Bushby, Richard J.;
Evans, Stephen D.;
Lydon, John E.;
Tate, Daniel J.

Publication type:

Article

Light output improvement of 10 W operated vertical LEDs via surface roughening using a commercialized developer.

Published in:

Journal of Materials Science: Materials in Electronics, 2015, v. 26, n. 6, p. 3397, doi. 10.1007/s10854-015-2846-1

By:

Jeong, Tak;
Park, Hyung-Jo;
Jung, Ki;
Baek, Jong;
Ha, Jun-Seok;
Choi, Won-Sik;
Park, Si-Hyun

Publication type:

Article

Patterning ability of conducting polypyrrole thin films by positive photoresist.

Published in:

Journal of Materials Science: Materials in Electronics, 2015, v. 26, n. 2, p. 898, doi. 10.1007/s10854-014-2480-3

By:

Mahmoodian, Mehrnoosh;
Pourabbas, Behzad;
Hosseini, Mohammad;
Mohajerzadeh, Shams

Publication type:

Article

Profile of the wafer level ECD gold bumps under variable parameters.

Published in:

Journal of Materials Science: Materials in Electronics, 2008, v. 19, n. 6, p. 563, doi. 10.1007/s10854-007-9387-1

By:

Jing, X. M.;
Engelmann, G.;
Chen, D.;
Wolf, J.;
Ehrmann, O.;
Reichl, H.

Publication type:

Article

Polymeric photoacid generators for direct photochemical modification of surface.

Published in:

Polymers for Advanced Technologies, 2008, v. 19, n. 3, p. 237, doi. 10.1002/pat.1005

By:

Jung, Sung-Ouk;
Jung, Myung-Sup;
Choi, Tae-Lim;
Huh, Nam;
Ko, Christopher;
Jung, Hee-Tae

Publication type:

Article

Electromagnetic Field Distribution in a Nanolayer of a Photoresist during Focusing of a Surface Plasmon Wave on the Nanopoint of a Scanning Metal Microtip.

Published in:

High Temperature, 2023, v. 61, n. 4, p. 458, doi. 10.1134/S0018151X23040120

By:

Petrin, A. B.

Publication type:

Article

抛光液组分对3D 微同轴中铜和光刻胶化学机械抛光速率选择性的影响.

Published in:

Electroplating & Finishing, 2022, v. 41, n. 7, p. 486, doi. 10.19289/j.1004-227x.2022.07.007

By:

李森;
王胜利;
李红亮;
王辰伟;
雷双双;
刘启旭

Publication type:

Article

A Simple Laboratory Method to Pattern Sub‐Millimeter Features of Conductive Films of Gold and Indium Tin Oxide.

Published in:

Instrumentation Science & Technology, 2007, v. 35, n. 1, p. 53, doi. 10.1080/10739140601000897

By:

Hawatky, Amna;
Osterloh, FrankE.

Publication type:

Article

Mechanical Characterization of KMPR by Nano-Indentation for MEMS Applications.

Published in:

Strain, 2008, v. 44, n. 3, p. 267, doi. 10.1111/j.1475-1305.2007.00367.x

By:

Ou, K.-S.;
Yan, H.-Y.;
Chen, K.-S.

Publication type:

Article

Controllable Self Assembly of Colloidal Crystal Arrays on SU-8 Photoresist Micropatterns.

Published in:

Integrated Ferroelectrics, 2013, v. 144, n. 1, p. 79, doi. 10.1080/10584587.2013.787342

By:

Yang, Shu-Jing;
Yu, Bing;
Cong, Hai-Lin;
Zhang, Mei-Rong;
Chi, Xiao-Fang;
Ma, Yu-Rong;
Wang, Ji-Lei;
Bai, Xue;
Wang, Shao-Peng

Publication type:

Article

TEMPORARY PACKAGING OF PZT THIN-FILM MICROACTUATORS.

Published in:

Integrated Ferroelectrics, 2008, v. 101, n. 1, p. 121, doi. 10.1080/10584580802470827

By:

CHENG-CHUN LEE;
HUME, CLIFFORD R.;
CAO, G. Z.;
SHEN, I. Y.

Publication type:

Article

Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas.

Published in:

Integrated Ferroelectrics, 2007, v. 90, n. 1, p. 95, doi. 10.1080/10584580701249371

By:

Jang Woo Lee;
Han Na Cho;
Su Ryun Min;
Chee Won Chung

Publication type:

Article

DRY ETCHING OF HIGH-K DIELECTRIC PZT STACKS FOR INTEGRATED PASSIVE DEVICES.

Published in:

Integrated Ferroelectrics, 2006, v. 86, n. 1, p. 49, doi. 10.1080/10584580601085669

By:

Beique, Genevieve;
Almerico, John;
Ditizio, Robert;
Guegan, Guillaume;
Queniot, Jean Philipe

Publication type:

Article

INVESTIGATION ON ETCH CHARACTERISTICS OF GESBTE THIN FILMS FOR PHASE-CHANGE MEMORY.

Published in:

Integrated Ferroelectrics, 2006, v. 80, n. 1, p. 207, doi. 10.1080/10584580600657674

By:

Ik Park;
Jang Lee;
Chee Chung

Publication type:

Article

MICROFABRICATION OF EPITAXIAL La 1- x (Sr,Ca) x MnO 3 IR BOLOMETER ON Si.

Published in:

Integrated Ferroelectrics, 2006, v. 80, n. 1, p. 47, doi. 10.1080/10584580600656171

By:

Joo-Hyung Kim;
Grishin, Alexander M.

Publication type:

Article

A Study on Uniformity Characteristics of a Magnetized Inductively Coupled Plasma.

Published in:

Plasma Physics Reports, 2020, v. 46, n. 3, p. 328, doi. 10.1134/S1063780X20030034

By:

Hee-Woon Cheong;
Lee, Woohyun;
Kim, Ji-Won;
Cha, Sujin;
Kim, Kyoungji;
Lee, Hwally

Publication type:

Article

Capturing the Motion of Laser Pulse in Photoresist Mixture with Compressed Ultrafast Photography.

Published in:

Photonics, 2022, v. 9, n. 12, p. 903, doi. 10.3390/photonics9120903

By:

Liu, Xinyue;
Xu, Bin;
Du, Zihao;
Ding, Yi;
Hu, Yi;
Zhan, Xiaojiang;
Liao, Shengbin;
Xi, Jiangtao

Publication type:

Article

Smart Substrates: Improving Pattern Fidelity with the Gain Enhancing Underlayers, APPAG.

Published in:

Journal of Macromolecular Science: Physics, 2007, v. 46, n. 1, p. 33, doi. 10.1080/00222340601036744

By:

Meagley, RobertP.;
Sharma, Shalini;
Sharma, Geeta;
Goodin, Kate;
Rattner, Michael

Publication type:

Article

Anticounterfeiting method for a dot-matrix hologram composed of grating dots with different fringe orientations.

Published in:

Optical Engineering, 2015, v. 54, n. 11, p. 1, doi. 10.1117/1.OE.54.11.113106

By:

Sheng Lih Yeh;
Shyh Tsong Lin

Publication type:

Article

Design and fabrication of sine-top broadband gold-coated gratings.

Published in:

Optical Engineering, 2015, v. 54, n. 10, p. 105109-1, doi. 10.1117/1.OE.54.10.105109

By:

Bilali Muhutijiang;
Keqiang Qiu;
Xiaolong Jiang;
Shaojun Fu

Publication type:

Article

Straightforward technique for in situ imaging of spin-coated thin films.

Published in:

Optical Engineering, 2015, v. 54, n. 2, p. 1, doi. 10.1117/1.OE.54.2.024109

By:

Toolan, Daniel T. W.

Publication type:

Article

Fiber-optic sensor tip for measuring temperature and liquid refractive index.

Published in:

Optical Engineering, 2014, v. 53, n. 11, p. 1, doi. 10.1117/1.OE.53.11.116110

By:

Min Li;
Yi Liu;
Shiliang Qu;
Yan Li

Publication type:

Article

Holograms recording with pulsed laser on diazonaphthoquinone-novolac-based photoresists and their nanocomposites.

Published in:

Optical Engineering, 2014, v. 53, n. 9, p. 1, doi. 10.1117/1.OE.53.9.097101

By:

Zacharovas, Stanislovas J.;
Bakanas, Ramūnas;
Adlienė, Diana;
Šeperys, Rimas;
Narmontas, Pranas;
Jankauskaitė, Virginija

Publication type:

Article