Works matching DE "PEGASUS Software Systems Inc."

Preliminary simulation of Magnetron sputtering using Pegasus software.

Published in:

Electrotechnica & Electronica (E+E), 2018, v. 53, n. 7/8, p. 181

By:

• Hitoshi Suizu;
• Ryota Matsuda;
• Tomonori Tabe;
• Hiroshi Toyota;
• Takeshi Tanaka

Publication type:

Article