Analysis of MEMS structures to identify their frequency response oriented to acoustic applications.
- Published in:
- Superficies y Vacío, 2015, v. 28, n. 1, p. 12
- By:
- Publication type:
- Article
Works matching DE "MICRO-opto-electromechanical systems"
Results: 6
1
2
Probing Planck-scale spacetime by cavity opto-atomic |$^{87}$| Rb interferometry.
- Published in:
- Progress of Theoretical & Experimental Physics: PTEP, 2019, v. 2019, n. 5, p. N.PAG, doi. 10.1093/ptep/ptz039
- By:
- Publication type:
- Article
3
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.
- Published in:
- Sensors (14248220), 2017, v. 17, n. 4, p. 779, doi. 10.3390/s17040779
- By:
- Publication type:
- Article
4
Miniaturized Integrated Platform for Electrical and Optical Monitoring of Cell Cultures.
- Published in:
- Sensors (14248220), 2012, v. 12, n. 8, p. 11372, doi. 10.3390/s120811372
- By:
- Publication type:
- Article
5
Electrothermal Actuators for SiO<sub>2</sub> Photonic MEMS.
- Published in:
- Micromachines, 2016, v. 7, n. 11, p. 200, doi. 10.3390/mi7110200
- By:
- Publication type:
- Article
6
Hamamatsu announces the completion of a new facility for the development and mass production of MOEMS-based products.
- Published in:
- infocus Magazine, 2014, n. 35, p. 84
- Publication type:
- Article