Works about MEMS resonators

Results: 341

Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout.

Published in:

Microsystems & Nanoengineering, 2025, v. 11, n. 1, p. 1, doi. 10.1038/s41378-025-00996-2

By:

Zhang, Ya;
Ebata, Kazuki;
Iimori, Mirai;
Liu, Qian;
Zhao, Zihao;
Takeuchi, Ryotaro;
Li, Hua;
Maenaka, Kazusuke;
Hirakawa, Kazuhiko

Publication type:

Article

Limit cycle convergence leads to period-doubling and cyclic-fold bifurcation in internal resonance-induced mechanical frequency combs.

Published in:

Nonlinear Dynamics, 2025, v. 113, n. 15, p. 19289, doi. 10.1007/s11071-025-11169-1

By:

Wu, Jiahao;
Song, Penghui;
Zang, Shuke;
Li, Lei;
Zhang, Wenming;
Shao, Lei

Publication type:

Article

Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level.

Published in:

Journal of Sensors & Sensor Systems, 2025, v. 14, n. 1, p. 89, doi. 10.5194/jsss-14-89-2025

By:

Huber, Dominik;
Schneider, Michael;
Fulmek, Paul;
Pfusterschmied, Georg;
Schmid, Ulrich

Publication type:

Article

Charge Pump Phase-Locked Loop-Based Frequency Conditioning of a MEMS Resonator.

Published in:

Journal of Low Power Electronics & Applications, 2025, v. 15, n. 2, p. 23, doi. 10.3390/jlpea15020023

By:

Hu, Xinyuan;
Jiang, Yanfeng

Publication type:

Article

Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal.

Published in:

Micromachines, 2025, v. 16, n. 6, p. 704, doi. 10.3390/mi16060704

By:

Bu, Feng;
Fan, Bo;
Feng, Rui;
Zhou, Ming;
Wang, Yiwang

Publication type:

Article

State of the art of rational design of efficient mufflers.

Published in:

Noise Control Engineering Journal, 2023, v. 71, n. 3, p. 169, doi. 10.3397/1/377115

By:

Munjal, M. L.;
Kumar, K. M.

Publication type:

Article

CMOS-MEMS Resonators and Oscillators: A Review.

Published in:

Sensors & Materials, 2018, v. 30, n. 4, Part 1, p. 733, doi. 10.18494/SAM.2018.1857

By:

Chao-Yu Chen;
Ming-Huang Li;
Sheng-Shian Li

Publication type:

Article

Stabilization of Nonlinear Vibration of a Fractional-Order Arch MEMS Resonator Using a New Disturbance-Observer-Based Finite-Time Sliding Mode Control.

Published in:

Mathematics (2227-7390), 2023, v. 11, n. 4, p. 978, doi. 10.3390/math11040978

By:

Alsubaie, Hajid;
Yousefpour, Amin;
Alotaibi, Ahmed;
Alotaibi, Naif D.;
Jahanshahi, Hadi

Publication type:

Article

Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators.

Published in:

Mathematics (2227-7390), 2020, v. 8, n. 7, p. 1124, doi. 10.3390/math8071124

By:

Serdean, Florina;
Pustan, Marius;
Dudescu, Cristian;
Birleanu, Corina;
Serdean, Mihai

Publication type:

Article

Design of UWB Filtering Impedance Transformers and Power Dividers Using Stepped-Impedance Resonators.

Published in:

Electronics (2079-9292), 2023, v. 12, n. 13, p. 2800, doi. 10.3390/electronics12132800

By:

Cao, Ziheng;
Liu, Yun;
Liang, Chen;
Majid, Irfan

Publication type:

Article

Novel Nth/2Nth Order Two-Band Bandpass Filters for Sub-6 GHz 5G Applications.

Published in:

Electronics (2079-9292), 2023, v. 12, n. 3, p. 626, doi. 10.3390/electronics12030626

By:

Karpuz, Ceyhun;
Özdemir, Pınar Öztürk;
Unuk, Gülfem Balasu Fırat

Publication type:

Article

Positioning Algorithm of MEMS Pipeline Inertial Locator Based on Dead Reckoning and Information Multiplexing.

Published in:

Electronics (2079-9292), 2022, v. 11, n. 18, p. N.PAG, doi. 10.3390/electronics11182931

By:

Wei, Xiaofeng;
Fan, Shiwei;
Zhang, Ya;
Chang, Longkang;
Wang, Guochen;
Shen, Feng

Publication type:

Article

A Novel Extensional Bulk Mode Resonator with Low Bias Voltages.

Published in:

Electronics (2079-9292), 2022, v. 11, n. 6, p. 910, doi. 10.3390/electronics11060910

By:

Jia, Qianqian;
Chen, Zeji;
Liu, Wenli;
Yang, Jinling;
Zhu, Yinfang;
Yang, Fuhua

Publication type:

Article

Interference Signal Identification of Sensor Array Based on Convolutional Neural Network and FPGA Implementation.

Published in:

Electronics (2079-9292), 2021, v. 10, n. 22, p. 2867, doi. 10.3390/electronics10222867

By:

Huang, Lin;
Geng, Xingguang;
Xu, Hao;
Zhang, Yitao;
Li, Zhiqiang;
Zhang, Jun;
Zhang, Haiying

Publication type:

Article

A 6.89-MHz 143-nW MEMS Oscillator Based on a 118-dBΩ Tunable Gain and Duty-Cycle CMOS TIA.

Published in:

Electronics (2079-9292), 2021, v. 10, n. 21, p. 2646, doi. 10.3390/electronics10212646

By:

Kira, Ahmed;
Elsayed, Mohannad Y.;
Allidina, Karim;
Chodavarapu, Vamsy P.;
El-Gamal, Mourad N.

Publication type:

Article

Dynamics, Control, and Modeling of Fractional-Order Systems.

Published in:

2018

By:

Balthazar, José M.;
Gonçalves, Paulo B.;
Litak, Grzegorz;
Tusset, Angelo M.;
Cveticanin, Livija

Publication type:

Editorial

Shape optimization of geometrically nonlinear modal coupling coefficients: an application to MEMS gyroscopes.

Published in:

Scientific Reports, 2025, v. 15, n. 1, p. 1, doi. 10.1038/s41598-025-95412-0

By:

Schiwietz, Daniel;
Hörsting, Marian;
Weig, Eva Maria;
Wenzel, Matthias;
Degenfeld-Schonburg, Peter

Publication type:

Article

Exploiting Nonlinearities of Electrostatic MEMS Resonators for Tunable Low Pressure Sensing.

Published in:

International Journal of Applied Mechanics, 2024, v. 16, n. 8, p. 1, doi. 10.1142/S1758825124500893

By:

Alattar, Basil;
Ghommem, Mehdi

Publication type:

Article

Artificial Neural Network Approach for Estimation of Moisture Content in Crude Oil by Using a Microwave Sensor.

Published in:

International Journal of Microwave & Optical Technology, 2023, v. 18, n. 5, p. 511

By:

Abdulsattar, Rusul Khalid;
Sadeq, Saif Muqdad;
Elwi, Taha A.;
Abdul Hassain, Zaid A.;
Muhsin, Muhannad Yousif

Publication type:

Article

Constrained MEMS-Based INS/UWB Tightly Coupled System for Accurate UGVs Navigation.

Published in:

Remote Sensing, 2023, v. 15, n. 10, p. 2535, doi. 10.3390/rs15102535

By:

Mi, Jing;
Wang, Qing;
Han, Xiaotao

Publication type:

Article

A review of piezoelectric MEMS sensors and actuators for gas detection application.

Published in:

Discover Nano, 2023, v. 18, n. 1, p. 1, doi. 10.1186/s11671-023-03779-8

By:

Ba Hashwan, Saeed S.;
Khir, Mohd Haris Md.;
Nawi, Illani Mohd;
Ahmad, Mohamad Radzi;
Hanif, Mehwish;
Zahoor, Furqan;
Al-Douri, Y.;
Algamili, Abdullah Saleh;
Bature, Usman Isyaku;
Alabsi, Sami Sultan;
Sabbea, Mohammed O. Ba;
Junaid, Muhammad

Publication type:

Article

A compact high‐sensitivity tangential E‐probe with resonator and coupled balun.

Published in:

Electronics Letters (Wiley-Blackwell), 2022, v. 58, n. 14, p. 551, doi. 10.1049/ell2.12522

By:

Zhang, Shang;
Liu, Zhenguo;
Chen, Zhipeng;
Li, Mengzi;
Lu, Weibing

Publication type:

Article

Characteristics of phase delay in capacitive pick-off circuits for MEMS resonators.

Published in:

Electronics Letters (Wiley-Blackwell), 2019, v. 55, n. 8, p. 461, doi. 10.1049/el.2019.0277

By:

Haibin Wu;
Qiongxia Pang;
Xudong Zheng;
Zhipeng Ma;
Yiyu Lin;
Zhonghe Jin

Publication type:

Article

Cavity-depth Effect on 3D Wafer-level-packaged MEMS Resonators by Slide-film Damping.

Published in:

Sensors & Materials, 2024, v. 36, n. 2, Part 1, p. 415, doi. 10.18494/SAM4707

By:

Hengmao Liang;
Shilei Lv;
Songjia Han;
Hongshan Liu;
Yongbing Long

Publication type:

Article

An Approach to the Extreme Miniaturization of Rotary Comb Drives.

Published in:

Actuators, 2018, v. 7, n. 4, p. 70, doi. 10.3390/act7040070

By:

Veroli, Andrea;
Buzzin, Alessio;
Frezza, Fabrizio;
de Cesare, Giampiero;
Hamidullah, Muhammad;
Giovine, Ennio;
Verotti, Matteo;
Belfiore, Nicola Pio

Publication type:

Article

Applied Mechatronics: On Mitigating Disturbance Effects in MEMS Resonators Using Robust Nonsingular Terminal Sliding Mode Controllers.

Published in:

Machines, 2022, v. 10, n. 1, p. 34, doi. 10.3390/machines10010034

By:

Azizi, Aydin;
Mobki, Hamed;
Ouakad, Hassen M.;
Speily, Omid Reza B.

Publication type:

Article

On the Evaluation of Errors in the Virtual Design of Mechanical Systems.

Published in:

Machines, 2018, v. 6, n. 3, p. 36, doi. 10.3390/machines6030036

By:

Villecco, Francesco

Publication type:

Article

Conventional band demultiplexer with high quality factor and transmission power based on four optimized shaped photonic crystal resonators.

Published in:

Journal of Optical Communications, 2023, v. 44, n. 1, p. s691, doi. 10.1515/joc-2019-0257

By:

Larioui, Fateh;
Lebbal, Mohamed Redha;
Bouchemat, Touraya;
Bouchemat, Mohamed

Publication type:

Article

Thermoelastic damping suppression method of micro-beam resonators with basically constant resonant frequency.

Published in:

Journal of Thermal Stresses, 2022, v. 45, n. 12, p. 960, doi. 10.1080/01495739.2022.2120939

By:

Cheng, Rongjun;
Song, Pengcheng;
Chen, Jiaxing;
Huang, Qiangxian;
Zhang, Liansheng

Publication type:

Article

Thermoelastic damping in rectangular micro/nanoplate resonators by considering three-dimensional heat conduction and modified couple stress theory.

Published in:

Journal of Thermal Stresses, 2022, v. 45, n. 11, p. 843, doi. 10.1080/01495739.2022.2103058

By:

Yang, Longfei;
Li, Pu;
Gao, Qiang;
Gao, Tianyu

Publication type:

Article

Analysis of Forced Vibrations in Micro-Scale Anisotropic Thermo-Elastic Beams Due to Concentrated Loads.

Published in:

Journal of Thermal Stresses, 2014, v. 37, n. 1, p. 93, doi. 10.1080/01495739.2013.839523

By:

Sharma, J.N.;
Kaur, Ramandeep

Publication type:

Article

Large-Deflection Effect on Thermoelastic Dissipation of Microbeam Resonators.

Published in:

Journal of Thermal Stresses, 2012, v. 35, n. 12, p. 1076, doi. 10.1080/01495739.2012.720474

By:

Tunvir, K.;
Ru, C.Q.;
Mioduchowski, A.

Publication type:

Article

Ribbing of micro-plates as a remedy for stiffening and curling resulting during fabrication.

Published in:

Journal of Mechanical Science & Technology, 2024, v. 38, n. 12, p. 6781, doi. 10.1007/s12206-024-1131-8

By:

Bakeer, Bahi;
Elsabbagh, Adel;
Hedaya, Mohammed

Publication type:

Article

Thermal Buckling and Postbuckling Behaviors of Couple Stress and Surface Energy-Enriched FG-CNTR Nanobeams.

Published in:

Symmetry (20738994), 2022, v. 14, n. 11, p. 2228, doi. 10.3390/sym14112228

By:

Kong, Liulin;
Zhang, Bo;
Li, Cheng

Publication type:

Article

FRACTAL PULL-IN MOTION OF ELECTROSTATIC MEMS RESONATORS BY THE VARIATIONAL ITERATION METHOD.

Published in:

Fractals, 2023, v. 31, n. 9, p. 1, doi. 10.1142/S0218348X23501220

By:

FENG, GUANG-QING;
ZHANG, LI;
TANG, WEI

Publication type:

Article

AZ4620 Photoresist as an Alternative Sacrificial Layer for Surface Micromachining.

Published in:

Journal of Electronic Materials, 2020, v. 49, n. 12, p. 7598, doi. 10.1007/s11664-020-08438-7

By:

Minhas, Ashudeep;
Bajpai, Anuroop;
Mehta, Khushbu;
Kumar, Prem;
Kumar, Amit;
Bansal, Deepak

Publication type:

Article

Theoretical insights into 1:2 and 1:3 internal resonance for frequency stabilization in nonlinear micromechanical resonators.

Published in:

Nonlinear Dynamics, 2025, v. 113, n. 13, p. 15943, doi. 10.1007/s11071-025-10987-7

By:

Donmez, Ata;
Herath, Hansaja;
Cho, Hanna

Publication type:

Article

Internal resonance of a U-shaped microresonator for gas sensing.

Published in:

Nonlinear Dynamics, 2025, v. 113, n. 8, p. 7677, doi. 10.1007/s11071-024-10571-5

By:

Lenz, Wagner B.;
Rocha, Rodrigo T.;
Khan, Fahimullah;
Grande, Carlos A.;
Younis, Mohammad I.

Publication type:

Article

Model order reduction and stochastic averaging for the analysis and design of micro-electro-mechanical systems.

Published in:

Nonlinear Dynamics, 2024, v. 112, n. 5, p. 3421, doi. 10.1007/s11071-023-09225-9

By:

Bonnin, Michele;
Song, Kailing;
Traversa, Fabio L.;
Bonani, Fabrizio

Publication type:

Article

Triple sensing scheme based on nonlinear coupled micromachined resonators.

Published in:

Nonlinear Dynamics, 2023, v. 111, n. 24, p. 22185, doi. 10.1007/s11071-023-08674-6

By:

Fang, Zhengliang;
Theodossiades, Stephanos;
Hajjaj, Amal Z.

Publication type:

Article

Fuzzy adaptive optimal backstepping control of the FO MEMS resonator under imprecise target trajectory with disturbance compensation mechanism.

Published in:

Nonlinear Dynamics, 2023, v. 111, n. 19, p. 17939, doi. 10.1007/s11071-023-08744-9

By:

Zhao, Le;
Yang, Guanci;
Li, Yang;
Hu, Xuechun

Publication type:

Article

A multi-sensing scheme based on nonlinear coupled micromachined resonators.

Published in:

Nonlinear Dynamics, 2023, v. 111, n. 9, p. 8021, doi. 10.1007/s11071-023-08294-0

By:

Fang, Zhengliang;
Theodossiades, Stephanos;
Ruzziconi, Laura;
Hajjaj, Amal Z.

Publication type:

Article

Frequency combs in a MEMS resonator featuring 1:2 internal resonance: ab initio reduced order modelling and experimental validation.

Published in:

Nonlinear Dynamics, 2023, v. 111, n. 4, p. 2991, doi. 10.1007/s11071-022-08029-7

By:

Gobat, Giorgio;
Zega, Valentina;
Fedeli, Patrick;
Touzé, Cyril;
Frangi, Attilio

Publication type:

Article

Electrostatic nonlinear dispersive parametric mode interaction.

Published in:

Nonlinear Dynamics, 2023, v. 111, n. 4, p. 3081, doi. 10.1007/s11071-022-08007-z

By:

Sun, Xiaopeng;
Zhou, Xin;
Ren, Xingjing;
Li, Lan;
Miao, Tongqiao;
Lu, Kuo;
Wu, Xuezhong;
Xiao, Dingbang

Publication type:

Article

Internal resonance in a MEMS levitation force resonator.

Published in:

Nonlinear Dynamics, 2022, v. 110, n. 2, p. 1151, doi. 10.1007/s11071-022-07721-y

By:

Zamanzadeh, Mohammadreza;
Meijer, Hil G. E.;
Ouakad, Hassen M.

Publication type:

Article

Modal coupled vibration behavior of piezoelectric L-shaped resonator induced by added mass.

Published in:

Nonlinear Dynamics, 2022, v. 109, n. 4, p. 2297, doi. 10.1007/s11071-022-07606-0

By:

Li, Lei;
Liu, Hanbiao;
Liu, Chen;
Wang, Faguang;
Han, Jianxin;
Zhang, Wenming

Publication type:

Article

Dynamical analysis and chaos control of MEMS resonators by using the analog circuit.

Published in:

Nonlinear Dynamics, 2022, v. 108, n. 1, p. 97, doi. 10.1007/s11071-022-07227-7

By:

Luo, Shaohua;
Ma, Huanhuan;
Li, Fengyun;
Ouakad, Hassen M.

Publication type:

Article

Preface to the special issue NODYCON 2021, Second International Nonlinear Dynamics Conference, Feb. 16–19, 2021.

Published in:

Nonlinear Dynamics, 2022, v. 107, n. 2, p. 1413, doi. 10.1007/s11071-022-07231-x

By:

Hajj, Muhammad;
Chen, Li-Qun;
Chen, YangQuan;
Lamarque, Claude H.;
Natsiavas, Sotirios;
Yabuno, Hiroshi

Publication type:

Article

Dynamic behavior of T-beam resonator with repulsive actuation.

Published in:

Nonlinear Dynamics, 2022, v. 107, n. 1, p. 15, doi. 10.1007/s11071-021-07073-z

By:

Tian, Yu;
Daeichin, Meysam;
Towfighian, Shahrzad

Publication type:

Article

A new type-3 fuzzy predictive controller for MEMS gyroscopes.

Published in:

Nonlinear Dynamics, 2021, v. 106, n. 1, p. 381, doi. 10.1007/s11071-021-06830-4

By:

Vafaie, Reza Hadjiaghaie;
Mohammadzadeh, Ardashir;
Piran, Md. Jalil

Publication type:

Article