ASML cracks Japanese market, ships to Seiko.Published in:Solid State Technology, 2001, v. 44, n. 2, p. 54Publication type:Article
Mattson plans to acquire STEAG unit, CFM.Published in:Solid State Technology, 2000, v. 43, n. 8, p. 36Publication type:Article
Pulsed thermal processing enables effective thin films.Published in:Advanced Materials & Processes, 2007, v. 165, n. 3, p. 14Publication type:Article