Works matching DE "ION bombardment measurement"

Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH₄-H₂ discharge in the a-Si:H to μc-Si:H transition regime.

Published in:

Physica Status Solidi. A: Applications & Materials Science, 2016, v. 213, n. 7, p. 1680, doi. 10.1002/pssa.201532917

By:

• Landheer, Kees;
• Goedheer, Wim J.;
• Poulios, Ioannis;
• Schropp, Ruud E. I.;
• Rath, Jatindra K.

Publication type:

Article