Works matching DE "ETCHING of silicon carbide"

Arc-Enhanced Plasma Machining Technology for High Efficiency Machining of Silicon Carbide.

Published in:

Plasma Chemistry & Plasma Processing, 2016, v. 36, n. 3, p. 891, doi. 10.1007/s11090-016-9695-4

By:

• Shi, Baolu;
• Dai, Yifan;
• Xie, Xuhui;
• Li, Shengyi;
• Zhou, Lin

Publication type:

Article