Works matching DE "ETCHING of silica"


Results: 7
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    Precision Etching of Thin Doped Silicon Layers.

    Published in:
    Journal of Communications Technology & Electronics, 2018, v. 63, n. 3, p. 303, doi. 10.1134/S1064226918030038
    By:
    • Borovkova, A. Yu.;
    • Grischina, T. N.;
    • Matyuhina, E. S.
    Publication type:
    Article
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