Works matching DE "ELECTRON beams"


Results: 5000
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    e-beam stepper lithography.

    Published in:
    Solid State Technology, 2000, v. 43, n. 5, p. 118
    By:
    • Okamoto, Kazuya;
    • Suzuki, Kazuaki;
    • Pfeiffer, Hans C.;
    • Sogard, Michael
    Publication type:
    Article
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    Technology vision.

    Published in:
    Surface Engineering, 2009, v. 25, n. 3, p. 177, doi. 10.1179/174329409X373701
    By:
    • Pinkerton, Andrew
    Publication type:
    Article
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