Works about ELECTRON beam lithography

Results: 459

Proximity effect correction in electron beam lithography using a composite function model of electron scattering energy distribution.

Published in:

Discover Nano, 2025, v. 20, n. 1, p. 1, doi. 10.1186/s11671-025-04264-0

By:

Mao, Qingyuan;
Zhu, Jingyuan;
Cheng, Xinbin;
Wang, Zhanshan

Publication type:

Article

Space charge effects in e-beam projection lithography.

Published in:

Solid State Technology, 2000, v. 43, n. 7, p. 241

By:

Mkrtchyan, Masis;
Liddle, J. Alexander;
Harriott, Lloyd R.;
Munro, Eric

Publication type:

Article

Favored SCALPEL's continued progress.

Published in:

Solid State Technology, 1999, v. 42, n. 7, p. 73

By:

Harriott, Lloyd;
Waskiewicz, Warren;
Novembre, Anthony;
Liddle, J. Alexander

Publication type:

Article

Electron Beam Lithography Nanopatterning of Plasma Polymers.

Published in:

Macromolecular Chemistry & Physics, 2021, v. 222, n. 12, p. 1, doi. 10.1002/macp.202100026

By:

Askew, Hannah J.;
Jarvis, Karyn L.;
Jones, Robert T.;
McArthur, Sally L.

Publication type:

Article

Tailoring the Plasmonic Modes of a Grating-Nanocube Assembly to Achieve Broadband Absorption in the Visible Spectrum.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 43, p. 6797, doi. 10.1002/adfm.201401559

By:

Geldmeier, Jeffrey;
König, Tobias;
Mahmoud, Mahmoud A.;
El‐Sayed, Mostafa A.;
Tsukruk, Vladimir V.

Publication type:

Article

Nanoparticle Growth via Concentration Gradients Generated by Enzyme Nanopatterns.

Published in:

Advanced Functional Materials, 2014, v. 24, n. 24, p. 3692, doi. 10.1002/adfm.201304047

By:

de la Rica, Roberto;
Bat, Erhan;
Herpoldt, Karla L.;
Xie, Hai‐nan;
Bertazzo, Sergio;
Maynard, Heather D.;
Stevens, Molly M.

Publication type:

Article

Effect of interdigital transducers structure on insertion loss of high-frequency surface acoustic wave devices.

Published in:

Journal of Materials Science: Materials in Electronics, 2022, v. 33, n. 27, p. 22017, doi. 10.1007/s10854-022-08993-1

By:

Li, Lianqiu;
Wang, Fang;
Li, Kaixuan;
Han, Yemei;
Hu, Kai;
Sun, Zheng;
Xie, Yangyang;
Kong, Deqing;
Song, Dianyou;
Qian, Lirong;
Zhang, Kailiang

Publication type:

Article

A review: research progress of chemical–mechanical polishing slurry for copper interconnection of integrated circuits.

Published in:

International Journal of Advanced Manufacturing Technology, 2023, v. 125, n. 1/2, p. 47, doi. 10.1007/s00170-022-10775-2

By:

Yan, Han;
Niu, Xinhuan;
Qu, Minghui;
Luo, Fu;
Zhan, Ni;
Liu, Jianghao;
Zou, Yida

Publication type:

Article

On the similarities between micro/nano lithography and topology optimization projection methods.

Published in:

Structural & Multidisciplinary Optimization, 2013, v. 48, n. 4, p. 717, doi. 10.1007/s00158-013-0941-6

By:

Jansen, Miche;
Lazarov, Boyan;
Schevenels, Mattias;
Sigmund, Ole

Publication type:

Article

Carbon and graphene quantum dots in fuel cell application: An overview.

Published in:

International Journal of Energy Research, 2021, v. 45, n. 2, p. 1396, doi. 10.1002/er.5889

By:

Shaari, Norazuwana;
Kamarudin, Siti Kartom;
Bahru, Raihana

Publication type:

Article

Technology Research on the Preparation of DBR Semiconductor Lasers by Electron Beam Lithography.

Published in:

Integrated Ferroelectrics, 2023, v. 234, n. 1, p. 100, doi. 10.1080/10584587.2023.2191554

By:

Fang, Dan;
Zhang, Qiang;
Li, Han;
Liu, Sining

Publication type:

Article

High Power 980-nm Broad-Area Lasers with Distributed Bragg Reflection Grating.

Published in:

Integrated Ferroelectrics, 2021, v. 219, n. 1, p. 260, doi. 10.1080/10584587.2021.1911373

By:

Qiao, Chuang;
Fang, Dan;
Li;
Fang, Xuan;
Tang, Jilong;
Wang, Dengkui;
Zhang, Baoshun;
Wei, Zhipeng

Publication type:

Article

High Power 980-nm Broad-Area Lasers with Distributed Bragg Reflection Grating.

Published in:

Integrated Ferroelectrics, 2021, v. 219, n. 1, p. 260, doi. 10.1080/10584587.2021.1911373

By:

Qiao, Chuang;
Fang, Dan;
Li;
Fang, Xuan;
Tang, Jilong;
Wang, Dengkui;
Zhang, Baoshun;
Wei, Zhipeng

Publication type:

Article

Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials.

Published in:

Photonics, 2025, v. 12, n. 3, p. 226, doi. 10.3390/photonics12030226

By:

Liu, Zhongyang;
Chen, Yue;
Li, Xuanyu;
Wang, Luwei;
Qu, Junle

Publication type:

Article

Fabrication of Circular Defects in 2-Dimensional Photonic Crystal Lasers with Convex Edge Structure.

Published in:

Photonics, 2024, v. 11, n. 9, p. 853, doi. 10.3390/photonics11090853

By:

Zuo, Rubing;
Adachi, Yuki;
Kudo, Yuto;
Ye, Hanqiao;
Yagi, Tetsuya;
Morifuji, Masato;
Kajii, Hirotake;
Maruta, Akihiro;
Kondow, Masahiko

Publication type:

Article

Cryogenic Thermo-Optical Coefficient of SU-8 Measured Using a Racetrack Resonator at 850 nm.

Published in:

Photonics, 2024, v. 11, n. 9, p. 800, doi. 10.3390/photonics11090800

By:

Medina-Rangel, Salvador A.;
Maraviglia, Nicola;
O'Hara, John;
Vorobev, Artem S.;
Iadanza, Simone;
Pelucchi, Emanuele;
O'Faolain, Liam

Publication type:

Article

Impact of Grating Duty-Cycle Randomness on DFB Laser Performance.

Published in:

Photonics, 2024, v. 11, n. 6, p. 574, doi. 10.3390/photonics11060574

By:

Yang, Manpo;
Kong, Xiangpeng;
Li, Xun

Publication type:

Article

An Ultrabroadband and Cost-Effective Edge Coupler for Efficient Thin Film Lithium Niobate Photonics.

Published in:

Photonics, 2023, v. 10, n. 7, p. 760, doi. 10.3390/photonics10070760

By:

Chen, Houhong;
Ma, Fei;
Chen, Ke;
Dong, Jianwen

Publication type:

Article

Lithography Alignment Techniques Based on Moiré Fringe.

Published in:

Photonics, 2023, v. 10, n. 4, p. 351, doi. 10.3390/photonics10040351

By:

Jiang, Wenbo;
Wang, Huaran;
Xie, Wenda;
Qu, Zhefei

Publication type:

Article

Plasmonic Surface Lattice Resonances in Suspended Symmetric Double-Layer Gratings.

Published in:

Photonics, 2022, v. 9, n. 12, p. 890, doi. 10.3390/photonics9120890

By:

Cen, Mengjia;
Wang, Jiawei;
Liu, Jianxun;
Li, Ye;
Cai, Wenfeng;
Kong, Delai;
Luo, Dan;
Cao, Tun;
Liu, Yan Jun

Publication type:

Article

Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator.

Published in:

Optical Engineering, 2016, v. 55, n. 8, p. 087102-1, doi. 10.1117/1.OE.55.8.087102

By:

Zengzhi Huang;
Jinsong Xia

Publication type:

Article

Compact generation of superposed higher-order Bessel beams via composite diffractive optical elements.

Published in:

Optical Engineering, 2015, v. 54, n. 11, p. 1, doi. 10.1117/1.OE.54.11.111310

By:

Vijayakumar, Anand;
Bhattacharya, Shanti

Publication type:

Article

Spiral phase plates with radial discontinuities for the generation of multiring orbital angular momentum beams: fabrication, characterization, and application.

Published in:

Optical Engineering, 2015, v. 54, n. 11, p. 1, doi. 10.1117/1.OE.54.11.111307

By:

Ruffato, Gianluca;
Massari, Michele;
Carli, Marta;
Romanato, Filippo

Publication type:

Article

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling.

Published in:

Scientific Reports, 2023, v. 13, n. 1, p. 1, doi. 10.1038/s41598-023-45168-2

By:

Yang, Mingxiang;
Yan, Yunjie;
Wu, Zhenlin;
Gu, YiYing;
Zhao, Shiyuan;
Morthier, Geert;
Zhao, Mingshan

Publication type:

Article

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling.

Published in:

Scientific Reports, 2023, v. 13, n. 1, p. 1, doi. 10.1038/s41598-023-45168-2

By:

Yang, Mingxiang;
Yan, Yunjie;
Wu, Zhenlin;
Gu, YiYing;
Zhao, Shiyuan;
Morthier, Geert;
Zhao, Mingshan

Publication type:

Article

Fabrication of Al/AlOx/Al junctions with high uniformity and stability on sapphire substrates.

Published in:

Scientific Reports, 2023, v. 13, n. 1, p. 1, doi. 10.1038/s41598-023-39052-2

By:

Zheng, Yuzhen;
Li, Shuming;
Ding, Zengqian;
Xiong, Kanglin;
Feng, Jiagui;
Yang, Hui

Publication type:

Article

New advances strategies for surface functionalization of iron oxide magnetic nano particles (IONPs).

Published in:

Research on Chemical Intermediates, 2017, v. 43, n. 12, p. 7423, doi. 10.1007/s11164-017-3084-3

By:

Nosrati, Hamed;
Salehiabar, Marziyeh;
Davaran, Soodabeh;
Ramazani, Ali;
Manjili, Hamidreza;
Danafar, Hossein

Publication type:

Article

Recent Advances in Patterning Strategies for Full-Color Perovskite Light-Emitting Diodes.

Published in:

Nano-Micro Letters, 2023, v. 16, n. 1, p. 1, doi. 10.1007/s40820-023-01254-8

By:

Lee, Gwang Heon;
Kim, Kiwook;
Kim, Yunho;
Yang, Jiwoong;
Choi, Moon Kee

Publication type:

Article

Achieving High Aspect Ratio of Track Length to Width in Molds for Discrete Track Recording Media.

Published in:

Research Letters in Nanotechnology, 2008, p. 1, doi. 10.1155/2008/765398

By:

Aung, K. O.;
Shankaran, C.;
Sbiaa, R.;
Tan, E. L.;
Wong, S. K.;
Piramanayagam, S. N.

Publication type:

Article

Encrypted Electron Beam Lithography Nano-Signatures for Authentication.

Published in:

International Journal of High Speed Electronics & Systems, 2017, v. 26, n. 3, p. -1, doi. 10.1142/S0129156417400171

By:

Ahi, Kiarash;
Rivera, Abdiel;
Anwar, Mehdi

Publication type:

Article

Fabrication of Robust Nano-Signatures for Identification of Authentic Electronic Components and Counterfeit Avoidance.

Published in:

International Journal of High Speed Electronics & Systems, 2017, v. 26, n. 3, p. -1, doi. 10.1142/S0129156417400067

By:

Ahi, Kiarash;
Rivera, Abdiel;
Mazadi, Anas;
Anwar, Mehdi

Publication type:

Article

ZINC OXIDE NANOPARTICLES FOR ULTRAVIOLET PHOTODETECTION.

Published in:

International Journal of High Speed Electronics & Systems, 2011, v. 20, n. 1, p. 183, doi. 10.1142/S0129156411006519

By:

SAWYER, SHAYLA;
QIN, LIQIAO;
SHING, CHRISTOPHER

Publication type:

Article

RECENT PROGRESSES OF APPLICATION-ORIENTED MEMS THROUGH INDUSTRY-UNIVERSITY COLLABORATION.

Published in:

International Journal of High Speed Electronics & Systems, 2006, v. 16, n. 2, p. 693, doi. 10.1142/S0129156406003941

By:

Esashi, Masayoshi

Publication type:

Article

Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings.

Published in:

Journal of Applied Crystallography, 2012, v. 45, n. 5, p. 1038, doi. 10.1107/S0021889812030415

By:

Rueda, D. R.;
Martín-Fabiani, I.;
Soccio, M.;
Alayo, N.;
Pérez-Murano, F.;
Rebollar, E.;
García-Gutiérrez, M. C.;
Castillejo, M.;
Ezquerra, T. A.

Publication type:

Article

Multidimensional Measurement of Electrical Coupling Properties of Nanostructured Substrates and Living Cells.

Published in:

NANO (1793-2920), 2020, v. 15, n. 9, p. N.PAG, doi. 10.1142/S1793292020501192

By:

Han, Xueyan;
Dong, Litong;
Cao, Liang;
Liu, Chuanzhi;
Zhang, Wenxiao;
Qu, Kaige;
Liu, Ri;
Yang, Fan;
Wang, Zuobin

Publication type:

Article

Gold Nanoparticle Arrays Spectroscopy: Observation of Electrostatic and Radiative Dipole Interactions.

Published in:

NANO (1793-2920), 2015, v. 10, n. 1, p. 1550007-1, doi. 10.1142/S1793292015500071

By:

Marhaba, Salem

Publication type:

Article

Characterization of extracellular vesicles derived from mesenchymal stromal cells by surface-enhanced Raman spectroscopy.

Published in:

Analytical & Bioanalytical Chemistry, 2021, v. 413, n. 20, p. 5013, doi. 10.1007/s00216-021-03464-8

By:

Ćulum, Nina M.;
Cooper, Tyler T.;
Bell, Gillian I.;
Hess, David A.;
Lagugné-Labarthet, François

Publication type:

Article

Piezoelectric performance improvement of ScAlN film and two-port SAW resonator application.

Published in:

Electronics Letters (Wiley-Blackwell), 2019, v. 55, n. 25, p. 1355, doi. 10.1049/el.2019.2714

By:

Kaifei Dong;
Fang Wang;
Meng Deng;
Shuo Yan;
Kailiang Zhang

Publication type:

Article

Application of Scanning Hall Probe Microscopy Technique at Room Temperature 300K.

Published in:

Kirkuk University Journal for Scientific Studies, 2018, v. 13, n. 2, p. 166, doi. 10.32894/kujss.2018.145726

By:

Hussein Ali Mohammed

Publication type:

Article

Precisely nanostructured HfO2 rear passivation layers for ultra‐thin Cu(In,Ga)Se2.

Published in:

Progress in Photovoltaics, 2022, v. 30, n. 11, p. 1289, doi. 10.1002/pip.3576

By:

Anacleto, Pedro;
Hägglund, Carl;
Chen, Wei‐Chao;
Kovačič, Milan;
Krč, Janez;
Edoff, Marika;
Sadewasser, Sascha

Publication type:

Article

Exploiting rotational asymmetry for sub-50 nm mechanical nanocalligraphy.

Published in:

Microsystems & Nanoengineering, 2021, v. 7, n. 1, p. 1, doi. 10.1038/s41378-021-00300-y

By:

Farmakidis, Nikolaos;
Swett, Jacob L.;
Youngblood, Nathan;
Li, Xuan;
Evangeli, Charalambos;
Aggarwal, Samarth;
Mol, Jan A.;
Bhaskaran, Harish

Publication type:

Article

Nanooptical elements for visual verification.

Published in:

Scientific Reports, 2021, v. 11, n. 1, p. 1, doi. 10.1038/s41598-021-81950-w

By:

Goncharsky, Alexander;
Goncharsky, Anton;
Melnik, Dmitry;
Durlevich, Svyatoslav

Publication type:

Article

Photodetecting properties of single CuO–ZnO core–shell nanowires with p–n radial heterojunction.

Published in:

Scientific Reports, 2020, v. 10, n. 1, p. N.PAG, doi. 10.1038/s41598-020-74963-4

By:

Costas, Andreea;
Florica, Camelia;
Preda, Nicoleta;
Kuncser, Andrei;
Enculescu, Ionut

Publication type:

Article

Cover and Frontmatter.

Published in:: Advanced Optical Technologies, 2019, v. 8, n. 3/4, p. i, doi. 10.1515/aot-2019-frontmatter3-4
Publication type:: Article

Toward full three-dimensional (3D) high volume fabrication.

Published in:

Advanced Optical Technologies, 2019, v. 8, n. 3/4, p. 171, doi. 10.1515/aot-2019-0030

By:

Kirchner, Robert;
Taniguchi, Jun

Publication type:

Article

Single-digit 6-nm multilevel patterns by electron beam grayscale lithography.

Published in:

Advanced Optical Technologies, 2019, v. 8, n. 3/4, p. 175, doi. 10.1515/aot-2019-0016

By:

Kirchner, Robert;
Guzenko, Vitaliy A.;
Schift, Helmut

Publication type:

Article

3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology.

Published in:

Advanced Optical Technologies, 2019, v. 8, n. 3/4, p. 253, doi. 10.1515/aot-2019-0004

By:

Unno, Noriyuki;
Taniguchi, Jun

Publication type:

Article

Producing Plant Virus Patterns with Defined 2D Structure.

Published in:

Physica Status Solidi. A: Applications & Materials Science, 2021, v. 218, n. 18, p. 1, doi. 10.1002/pssa.202100259

By:

Müller-Renno, Christine;
Remmel, Diana;
Braun, Mario;
Boonrod, Kajohn;
Krczal, Gabi;
Ziegler, Christiane

Publication type:

Article

Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures.

Published in:

Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 21, p. N.PAG, doi. 10.1002/pssa.201900314

By:

Heupel, Julia;
Felgen, Nina;
Merz, Rolf;
Kopnarski, Michael;
Reithmaier, Johann Peter;
Popov, Cyril

Publication type:

Article

Fabrication of Nanopillars on Nanocrystalline Diamond Membranes for the Incorporation of Color Centers.

Published in:

Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 21, p. N.PAG, doi. 10.1002/pssa.201900233

By:

Schmidt, Alexander;
Bernardoff, Josselin;
Singer, Kilian;
Reithmaier, Johann P.;
Popov, Cyril

Publication type:

Article