Works matching DE "EFFECT of radiation on silicon wafers"

Real-time detection of surface cracks on silicon wafers during laser beam irradiation.

Published in:

Journal of Mechanical Science & Technology, 2015, v. 29, n. 1, p. 39, doi. 10.1007/s12206-014-1206-z

By:

• Choi, Sungho;
• Yoon, Sung-Hee;
• Jhang, Kyung-Young;
• Shin, Wan-Soon

Publication type:

Article