Works matching DE "COMPUTER simulation of ion implantation"
Results: 1
Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory.
- Published in:
- Technical Physics, 2018, v. 63, n. 10, p. 1455, doi. 10.1134/S1063784218100225
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- Publication type:
- Article