CMP slurries: A wild ride ahead.
- Published in:
- Solid State Technology, 2000, v. 43, n. 12, p. 72
- Publication type:
- Article
Works matching DE "CABOT Microelectronics Corp."
Results: 3
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2
A Brief Review of U.S. and Korean Patent Invalidity Decisions for CMP Slurry Patents.
- Published in:
- Nanotechnology Law & Business, 2011, v. 8, n. 2, p. 85
- By:
- Publication type:
- Article
3
BRIEFS.
- Published in:
- Advanced Materials & Processes, 2006, v. 164, n. 1, p. 27
- Publication type:
- Article