Maskless Lithographic Pattern Generation System upon Micromirrors.
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- Computer-Aided Design & Applications, 2006, v. 3, n. 1-4, p. 185, doi. 10.1080/16864360.2006.10738455
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Works matching DE "ALGRAPHY"
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Extension of Pocket Machining to Direct Write Lithography.
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- Computer-Aided Design & Applications, 2006, v. 3, n. 1-4, p. 155, doi. 10.1080/16864360.2006.10738452
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3
Off Axis Illumination Planar Hyperlens for Non-contacted Deep Subwavelength Demagnifying Lithography.
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- Plasmonics, 2014, v. 9, n. 6, p. 1333, doi. 10.1007/s11468-014-9746-8
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- Article