Works by Urbansky, N.

Liners for tungsten plug applications with long throw and ionized PVD.

Published in:

Solid State Technology, 2000, v. 43, n. 7, p. 183

By:

• Butler, D. C.;
• Buchanan, Keith;
• Burgess, Stephen R.;
• Urbansky, N.;
• Schmidbauer, S.

Publication type:

Article