Found: 1
Select item for more details and to access through your institution.
Gas pressure dependence of optical and mechanical properties in a SiCO thin film for optical waveguide by reactive sputtering method.
- Published in:
- Electronics & Communications in Japan, 2024, v. 107, n. 1, p. 1, doi. 10.1002/ecj.12435
- By:
- Publication type:
- Article