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Correlative characterization of plasma etching resistance of various aluminum garnets.
- Published in:
- Journal of the American Ceramic Society, 2024, v. 107, n. 11, p. 7105, doi. 10.1111/jace.19951
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- Article
Processing map to control the erosion of Y<sub>2</sub>O<sub>3</sub> in fluorine based etching plasmas.
- Published in:
- Journal of the American Ceramic Society, 2022, v. 105, n. 5, p. 3498, doi. 10.1111/jace.18334
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- Article
Erosion behavior of Y<sub>2</sub>O<sub>3</sub> in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation.
- Published in:
- Journal of the American Ceramic Society, 2021, v. 104, n. 3, p. 1465, doi. 10.1111/jace.17556
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- Article