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Super fine cerium hydroxide abrasives for SiO<sub>2</sub> film chemical mechanical planarization performing scratch free.
- Published in:
- Scientific Reports, 2021, v. 11, n. 1, p. 1, doi. 10.1038/s41598-021-97122-9
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Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge 1 Sb 4 Te 5 Film Surface Chemical-Mechanical-Planarization.
- Published in:
- Applied Sciences (2076-3417), 2021, v. 11, n. 22, p. 10872, doi. 10.3390/app112210872
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- Article