Works by Siari, K.

Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell.

Published in:

Plasma Physics Reports, 2020, v. 46, n. 6, p. 667, doi. 10.1134/S1063780X20060094

By:

• Siari, K.;
• Rebiai, S.;
• Bahouh, H.;
• Bouanaka, F.

Publication type:

Article