Kinetics of Structural and Phase Transformations in Thin SiO<sub>x</sub> Films in the Course of a Rapid Thermal Annealing.
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- Semiconductors, 2005, v. 39, n. 10, p. 1197, doi. 10.1134/1.2085270
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- Article
Works by Shepelyavyı, P. E.
Results: 2
1
2
Characteristics of phase transitions in inhomogeneous silicon monoxide/chromium thin films exposed to pulsed laser irradiation.
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- Technical Physics Letters, 1999, v. 25, n. 2, p. 131, doi. 10.1134/1.1262376
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- Article