Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization.

Published in:

Applied Sciences (2076-3417), 2023, v. 13, n. 8, p. 4959, doi. 10.3390/app13084959

By:

• Belaya, Svetlana V.;
• Maksimovsky, Eugene A.;
• Shayapov, Vladimir R.;
• Shapovalova, Aleksandra A.;
• Kolodin, Alexey N.;
• Saraev, Andrey A.;
• Asanov, Igor P.;
• Khomyakov, Maxim N.;
• Yushina, Irina V.;
• Plekhanov, Aleksandr G.;
• Sulyaeva, Veronica S.;
• Kosinova, Marina L.

Publication type:

Article