Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning.Published in:Nanomaterials (2079-4991), 2022, v. 12, n. 14, p. N.PAG, doi. 10.3390/nano12142334By:Proust, Vanessa;Kirscher, Quentin;Nguyen, Thi Kim Ngan;Obringer, Lisa;Ishii, Kento;Rault, Ludivine;Demange, Valérie;Berthebaud, David;Ohashi, Naoki;Uchikoshi, Tetsuo;Berling, Dominique;Soppera, Olivier;Grasset, FabienPublication type:Article