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Growth of thin film ferroelectric PZT, PHT, and antiferroelectric PHO from atomic layer deposition precursors.
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- Journal of the American Ceramic Society, 2021, v. 104, n. 3, p. 1216, doi. 10.1111/jace.17521
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PZT-Based Piezoelectric MEMS Technology.
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- Journal of the American Ceramic Society, 2012, v. 95, n. 6, p. 1777, doi. 10.1111/j.1551-2916.2012.05155.x
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- Article