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On the Prospects of Lithography in the Region of Wavelengths Shorter than 13.5 nm.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, p. S226, doi. 10.1134/S1027451023070078
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Stress-Free Highly Reflective Multilayer Mo/Be/Si Mirrors for Operation in the Vicinity of the Wavelength 13.5 nm.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, p. S239, doi. 10.1134/S1027451023070492
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Study of the Reflectivity and Microstructure of Mo/Be Multilayer Mirrors.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, n. 6, p. 1319, doi. 10.1134/S1027451023060241
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Study of the X-ray Optical and Mechanical Characteristics of C/Si and B<sub>4</sub>C/Si Multilayer Mirrors.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, n. 6, p. 1350, doi. 10.1134/S1027451023060459
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On the Project of Scanning and Projection Microscopes for the Nanoscope Station for Biological Research in the Water Window.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, n. 3, p. 531, doi. 10.1134/S1027451023030114
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Investigation of physical properties of Si crystallites in W/Si multilayers.
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- Journal of Applied Crystallography, 2022, v. 55, n. 6, p. 1455, doi. 10.1107/S1600576722009529
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Application of Novel Multilayer Normal-Incidence Mirrors for EUV Solar Spectroscopy.
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- Technical Physics, 2020, v. 65, n. 11, p. 1736, doi. 10.1134/S1063784220110171
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Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam.
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- Technical Physics, 2020, v. 65, n. 11, p. 1780, doi. 10.1134/S1063784220110110
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- Article
The Smoothing Effect of Si Layers in Multilayer Be/Al Mirrors for the 17- to 31-nm Range.
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- Technical Physics, 2020, v. 65, n. 11, p. 1786, doi. 10.1134/S1063784220110201
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Broadband Mirrors for Spectroheliographs at the KORTES Sun Study Facility.
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- Technical Physics, 2020, v. 65, n. 11, p. 1792, doi. 10.1134/S1063784220110109
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- Article
The Microstructure of Transition Boundaries in Multilayer Mo/Be Systems.
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- Technical Physics, 2020, v. 65, n. 11, p. 1800, doi. 10.1134/S1063784220110250
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- Article
Multilayer Cr/Sc Mirrors with Improved Reflection for the "Water Transparency Window" Range.
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- Technical Physics, 2020, v. 65, n. 11, p. 1809, doi. 10.1134/S1063784220110225
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- Article
Projection Objective For an EUV-Lithographic Workbench.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2020, v. 14, n. 3, p. 562, doi. 10.1134/S1027451020030246
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- Article
Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2020, v. 14, n. 1, p. 124, doi. 10.1134/S1027451020020160
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- Article
Beryllium as a Material for Thermally Stable X-Ray Mirrors.
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- Technical Physics, 2019, v. 64, n. 11, p. 1596, doi. 10.1134/S1063784219110070
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Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range.
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- Technical Physics, 2019, v. 64, n. 11, p. 1673, doi. 10.1134/S1063784219110045
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- Article
Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm.
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- Technical Physics, 2019, v. 64, n. 11, p. 1684, doi. 10.1134/S1063784219110161
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- Article
Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors.
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- Technical Physics, 2019, v. 64, n. 11, p. 1688, doi. 10.1134/S1063784219110318
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- Article
Influence of Thermal Annealing on the Properties of Multilayer Mo/Be Mirrors.
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- Technical Physics, 2019, v. 64, n. 11, p. 1692, doi. 10.1134/S1063784219110252
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- Article
Mo/Si Multilayer Mirrors with B<sub>4</sub>C and Be Barrier Layers.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 2, p. 169, doi. 10.1134/S1027451019020216
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- Article
On the Possibilities of Multilayer Mirrors for Measuring the Concentration of Boron Impurities in Diamond.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 2, p. 173, doi. 10.1134/S1027451019020071
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- Article
Internal Stresses in Mo/Y Multilayer Mirrors.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 2, p. 177, doi. 10.1134/S1027451019020113
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- Article
Aperiodic Mirrors Based on Multilayer Beryllium Systems.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 2, p. 267, doi. 10.1134/S1027451019020290
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Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope.
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- Technical Physics Letters, 2019, v. 45, n. 2, p. 85, doi. 10.1134/S1063785019020147
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Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 1, p. 1, doi. 10.1134/S1027451019010026
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Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, v. 13, n. 1, p. 8, doi. 10.1134/S1027451019010208
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Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2018, v. 12, n. 6, p. 1253, doi. 10.1134/S1027451019010129
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Absolutely Calibrated Spectrally Resolved Measurements of Xe Laser Plasma Radiation Intensity in the EUV Range.
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- Technical Physics, 2018, v. 63, n. 10, p. 1507, doi. 10.1134/S1063784218100080
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- Article