Works matching AU Polcawich, R. G.

Effect of IrO₂/Pt, IrO₂, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices.

Published in:

Journal of Materials Science: Materials in Electronics, 2018, v. 29, n. 13, p. 11367, doi. 10.1007/s10854-018-9224-8

By:

• Potrepka, D. M.;
• Rivas, M.;
• Yu, H.;
• Aindow, M.;
• Fox, G. R.;
• Polcawich, R. G.

Publication type:

Article