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Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication.
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- Advanced Science, 2024, v. 11, n. 12, p. 1, doi. 10.1002/advs.202303518
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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification.
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- Microsystems & Nanoengineering, 2024, v. 10, n. 1, p. 1, doi. 10.1038/s41378-024-00655-y
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- Article