Works by Panfilov, Yuri V.


Results: 4
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    ITO film stack engineering for low-loss silicon optical modulators.

    Published in:
    Scientific Reports, 2022, v. 12, n. 1, p. 1, doi. 10.1038/s41598-022-09973-5
    By:
    • Lotkov, Evgeniy S.;
    • Baburin, Aleksandr S.;
    • Ryzhikov, Ilya A.;
    • Sorokina, Olga S.;
    • Ivanov, Anton I.;
    • Zverev, Alexander V.;
    • Ryzhkov, Vitaly V.;
    • Bykov, Igor V.;
    • Baryshev, Alexander V.;
    • Panfilov, Yuri V.;
    • Rodionov, Ilya A.
    Publication type:
    Article
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