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Mechanical Characterization of KMPR by Nano-Indentation for MEMS Applications.
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- Strain, 2008, v. 44, n. 3, p. 267, doi. 10.1111/j.1475-1305.2007.00367.x
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- Article
Mechanical Properties Measurement of PECVD Silicon Nitride after Rapid Thermal Annealing Using Nanoindentation Technique.
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- Strain, 2008, v. 44, n. 3, p. 259, doi. 10.1111/j.1475-1305.2007.00394.x
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- Article